Matches in SemOpenAlex for { <https://semopenalex.org/work/W4304136370> ?p ?o ?g. }
- W4304136370 abstract "Abstract Fabricating high‐quality thin films on a 3D structured polymer substrate is crucial in realizing high‐performance flexible electronics. Herein, simple yet effective twofold strategies are demonstrated to directly fabricate flexible thin film capacitors on polymer substrate: the crystallization of high‐ k TiO 2 film by plasma‐assisted atomic layer annealing at low temperature (80 °C) on nanostructured polycarbonate (PC) substrates fabricated by simple dynamic nanoinscribing (DNI) technique. Plasma‐induced amorphous‐to‐anatase phase transformation occurs in PEALD TiO 2 /ZrO 2 bilayer thin films, resulting in the capacitance density increase by 30%. The DNI patterning of PC substrates in two directions further increases the surface area by 35% and the capacitance density by 37%, leading to the flexible capacitor of a record‐high capacitance density (24.2 nF mm −2 ) with mechanical stability." @default.
- W4304136370 created "2022-10-11" @default.
- W4304136370 creator A5018198374 @default.
- W4304136370 creator A5020137850 @default.
- W4304136370 creator A5021492717 @default.
- W4304136370 creator A5029854402 @default.
- W4304136370 creator A5038296814 @default.
- W4304136370 creator A5049029303 @default.
- W4304136370 creator A5055169282 @default.
- W4304136370 creator A5074599279 @default.
- W4304136370 creator A5085404465 @default.
- W4304136370 date "2022-10-10" @default.
- W4304136370 modified "2023-10-17" @default.
- W4304136370 title "High‐Performance Nanostructured Flexible Capacitor by Plasma‐Induced Low‐Temperature Atomic Layer Annealing" @default.
- W4304136370 cites W1604991179 @default.
- W4304136370 cites W1966524213 @default.
- W4304136370 cites W1973031349 @default.
- W4304136370 cites W1984962131 @default.
- W4304136370 cites W1986252415 @default.
- W4304136370 cites W1995844924 @default.
- W4304136370 cites W1997477746 @default.
- W4304136370 cites W2002368199 @default.
- W4304136370 cites W2008960829 @default.
- W4304136370 cites W2009209058 @default.
- W4304136370 cites W2012380511 @default.
- W4304136370 cites W2016009798 @default.
- W4304136370 cites W2037037473 @default.
- W4304136370 cites W2047481433 @default.
- W4304136370 cites W2050027062 @default.
- W4304136370 cites W2052091927 @default.
- W4304136370 cites W2054896986 @default.
- W4304136370 cites W2061149609 @default.
- W4304136370 cites W2061518320 @default.
- W4304136370 cites W2061930543 @default.
- W4304136370 cites W2069963660 @default.
- W4304136370 cites W2080087531 @default.
- W4304136370 cites W2087536903 @default.
- W4304136370 cites W2100074107 @default.
- W4304136370 cites W2112659143 @default.
- W4304136370 cites W2123932887 @default.
- W4304136370 cites W2158932701 @default.
- W4304136370 cites W2164875840 @default.
- W4304136370 cites W2170518417 @default.
- W4304136370 cites W2260277692 @default.
- W4304136370 cites W2320589283 @default.
- W4304136370 cites W2514843481 @default.
- W4304136370 cites W2751922276 @default.
- W4304136370 cites W2769139467 @default.
- W4304136370 cites W2783529593 @default.
- W4304136370 cites W2811198581 @default.
- W4304136370 cites W2902474336 @default.
- W4304136370 cites W2924651549 @default.
- W4304136370 cites W2944769177 @default.
- W4304136370 cites W2971517369 @default.
- W4304136370 cites W2979479810 @default.
- W4304136370 cites W2985224229 @default.
- W4304136370 cites W3027990810 @default.
- W4304136370 cites W3081553151 @default.
- W4304136370 cites W3140554452 @default.
- W4304136370 cites W3157681891 @default.
- W4304136370 cites W3182641519 @default.
- W4304136370 cites W3190037232 @default.
- W4304136370 cites W3217423734 @default.
- W4304136370 cites W4242572675 @default.
- W4304136370 doi "https://doi.org/10.1002/admt.202201134" @default.
- W4304136370 hasPublicationYear "2022" @default.
- W4304136370 type Work @default.
- W4304136370 citedByCount "0" @default.
- W4304136370 crossrefType "journal-article" @default.
- W4304136370 hasAuthorship W4304136370A5018198374 @default.
- W4304136370 hasAuthorship W4304136370A5020137850 @default.
- W4304136370 hasAuthorship W4304136370A5021492717 @default.
- W4304136370 hasAuthorship W4304136370A5029854402 @default.
- W4304136370 hasAuthorship W4304136370A5038296814 @default.
- W4304136370 hasAuthorship W4304136370A5049029303 @default.
- W4304136370 hasAuthorship W4304136370A5055169282 @default.
- W4304136370 hasAuthorship W4304136370A5074599279 @default.
- W4304136370 hasAuthorship W4304136370A5085404465 @default.
- W4304136370 hasConcept C111368507 @default.
- W4304136370 hasConcept C119599485 @default.
- W4304136370 hasConcept C121332964 @default.
- W4304136370 hasConcept C127313418 @default.
- W4304136370 hasConcept C127413603 @default.
- W4304136370 hasConcept C147789679 @default.
- W4304136370 hasConcept C159985019 @default.
- W4304136370 hasConcept C161790260 @default.
- W4304136370 hasConcept C165801399 @default.
- W4304136370 hasConcept C171250308 @default.
- W4304136370 hasConcept C17525397 @default.
- W4304136370 hasConcept C185592680 @default.
- W4304136370 hasConcept C19067145 @default.
- W4304136370 hasConcept C192157962 @default.
- W4304136370 hasConcept C192562407 @default.
- W4304136370 hasConcept C203036418 @default.
- W4304136370 hasConcept C2777289219 @default.
- W4304136370 hasConcept C2777402863 @default.
- W4304136370 hasConcept C2777855556 @default.
- W4304136370 hasConcept C2779227376 @default.
- W4304136370 hasConcept C2781155771 @default.
- W4304136370 hasConcept C30066665 @default.