FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4307891222> ?p ?o ?g. }

• W4307891222 abstract "In the plasma etching technique, acquiring a high-quality transfer from the mask pattern onto the substrate under the suppression of the charging effects is of great significance. Most previous publications only focus on studying the charging phenomena on round mask holes. This work shifted the target to an isolated rectangle mask hole and two types of mask arrays (quadrangle and hexagonal arrays). A classical particle simulation program was used. This study first shows that rectangle holes with various ratios of length and width present different electric field (E-field) strength distribution around the long and short sides. The larger the ratio, the stronger the E-field in the long side is than that in the short one. In addition, the E-field shows a quite weak distribution at the vertexes, which is due to the low curvature of the vertexes. Based on the evolutions of E-field and the simulated profile with time, it is indicated that ions would give priority to bombard the long side rather than the short side and vertexes, forcing the sides to deform outward as arcs. Unlike an isolated mask hole, the mask array has a remarkable influence on the charging effects in case of the close distance between holes. Simply put, the quadrangle and hexagonal arrays relieve and worsen the non-uniformity of the distribution of the E-field at the edge of a rectangle mask hole, respectively. The simulated profile evolution further proves those speculations based on the E-field distribution. Possible mechanisms behind this have been discussed in detail. The findings of this work help arrange an appropriate mask pattern according to the specific mask shape, which would shed light on a way of maintaining the pattern integrity." @default.
• W4307891222 created "2022-11-06" @default.
• W4307891222 creator A5008440404 @default.
• W4307891222 creator A5052963678 @default.
• W4307891222 date "2022-10-01" @default.
• W4307891222 modified "2023-09-30" @default.
• W4307891222 title "The features of surface charging on rectangle mask holes in plasma etching" @default.
• W4307891222 cites W1969852806 @default.
• W4307891222 cites W1979408441 @default.
• W4307891222 cites W1981485725 @default.
• W4307891222 cites W1995293486 @default.
• W4307891222 cites W1997913942 @default.
• W4307891222 cites W2014601646 @default.
• W4307891222 cites W2035552387 @default.
• W4307891222 cites W2036228962 @default.
• W4307891222 cites W2040229999 @default.
• W4307891222 cites W2045858551 @default.
• W4307891222 cites W2048936233 @default.
• W4307891222 cites W2051133512 @default.
• W4307891222 cites W2071985143 @default.
• W4307891222 cites W2080165650 @default.
• W4307891222 cites W2082425881 @default.
• W4307891222 cites W2107596116 @default.
• W4307891222 cites W2109084853 @default.
• W4307891222 cites W2122067623 @default.
• W4307891222 cites W2155045055 @default.
• W4307891222 cites W2268231897 @default.
• W4307891222 cites W2387988865 @default.
• W4307891222 cites W2545757737 @default.
• W4307891222 cites W2725302656 @default.
• W4307891222 cites W2745372035 @default.
• W4307891222 cites W2790002900 @default.
• W4307891222 cites W2793730210 @default.
• W4307891222 cites W2886394542 @default.
• W4307891222 cites W2914792549 @default.
• W4307891222 cites W2984159197 @default.
• W4307891222 cites W3010721116 @default.
• W4307891222 cites W4205378639 @default.
• W4307891222 doi "https://doi.org/10.1063/5.0118581" @default.
• W4307891222 hasPublicationYear "2022" @default.
• W4307891222 type Work @default.
• W4307891222 citedByCount "1" @default.
• W4307891222 countsByYear W43078912222023 @default.
• W4307891222 crossrefType "journal-article" @default.
• W4307891222 hasAuthorship W4307891222A5008440404 @default.
• W4307891222 hasAuthorship W4307891222A5052963678 @default.
• W4307891222 hasConcept C100460472 @default.
• W4307891222 hasConcept C107187091 @default.
• W4307891222 hasConcept C110121322 @default.
• W4307891222 hasConcept C111368507 @default.
• W4307891222 hasConcept C120665830 @default.
• W4307891222 hasConcept C121332964 @default.
• W4307891222 hasConcept C127313418 @default.
• W4307891222 hasConcept C128765274 @default.
• W4307891222 hasConcept C134306372 @default.
• W4307891222 hasConcept C145148216 @default.
• W4307891222 hasConcept C159985019 @default.
• W4307891222 hasConcept C162307627 @default.
• W4307891222 hasConcept C171250308 @default.
• W4307891222 hasConcept C185592680 @default.
• W4307891222 hasConcept C192562407 @default.
• W4307891222 hasConcept C195065555 @default.
• W4307891222 hasConcept C202444582 @default.
• W4307891222 hasConcept C2524010 @default.
• W4307891222 hasConcept C2777289219 @default.
• W4307891222 hasConcept C2779227376 @default.
• W4307891222 hasConcept C2779693302 @default.
• W4307891222 hasConcept C2781302577 @default.
• W4307891222 hasConcept C30475298 @default.
• W4307891222 hasConcept C33923547 @default.
• W4307891222 hasConcept C41008148 @default.
• W4307891222 hasConcept C60799052 @default.
• W4307891222 hasConcept C62520636 @default.
• W4307891222 hasConcept C76155785 @default.
• W4307891222 hasConcept C8010536 @default.
• W4307891222 hasConcept C82706917 @default.
• W4307891222 hasConcept C9652623 @default.
• W4307891222 hasConceptScore W4307891222C100460472 @default.
• W4307891222 hasConceptScore W4307891222C107187091 @default.
• W4307891222 hasConceptScore W4307891222C110121322 @default.
• W4307891222 hasConceptScore W4307891222C111368507 @default.
• W4307891222 hasConceptScore W4307891222C120665830 @default.
• W4307891222 hasConceptScore W4307891222C121332964 @default.
• W4307891222 hasConceptScore W4307891222C127313418 @default.
• W4307891222 hasConceptScore W4307891222C128765274 @default.
• W4307891222 hasConceptScore W4307891222C134306372 @default.
• W4307891222 hasConceptScore W4307891222C145148216 @default.
• W4307891222 hasConceptScore W4307891222C159985019 @default.
• W4307891222 hasConceptScore W4307891222C162307627 @default.
• W4307891222 hasConceptScore W4307891222C171250308 @default.
• W4307891222 hasConceptScore W4307891222C185592680 @default.
• W4307891222 hasConceptScore W4307891222C192562407 @default.
• W4307891222 hasConceptScore W4307891222C195065555 @default.
• W4307891222 hasConceptScore W4307891222C202444582 @default.
• W4307891222 hasConceptScore W4307891222C2524010 @default.
• W4307891222 hasConceptScore W4307891222C2777289219 @default.
• W4307891222 hasConceptScore W4307891222C2779227376 @default.
• W4307891222 hasConceptScore W4307891222C2779693302 @default.
• W4307891222 hasConceptScore W4307891222C2781302577 @default.
• W4307891222 hasConceptScore W4307891222C30475298 @default.

• next