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• W4308075631 endingPage "115005" @default.
• W4308075631 startingPage "115005" @default.
• W4308075631 abstract "BCl 3 is an attractive plasma etchant for oxides because it is a Lewis acid used to scavenge native oxides on many semiconductors due to the strong B–O bonding. We investigated BCl 3 -based dry etching of the NiO/Ga 2 O 3 heterojunction system. BCl 3 /Ar Inductively Coupled Plasmas produced maximum etch rates for NiO up to 300 Å.min −1 and 800 Å.min −1 for β -Ga 2 O 3 under moderate plasma power conditions suitable for low damage pattern transfer. The selectivity for NiO: Ga 2 O 3 was <1 under all conditions. The ion energy threshold for initiation of etching of NiO was between 35–60 eV, depending on the condition and the etch mechanism was ion-driven, as determined by the linear dependence of etch rate on the square root of ion energy incident on the surface. By sharp contrast, the etching of Ga 2 O 3 had a stronger chemical component, without a well-defined ion energy threshold. The as-etched NiO and Ga 2 O 3 surfaces show chlorine residues, which can be removed on both materials by the standard 1NH 4 OH: 10H 2 O or 1HCl: 10H 2 O rinses used for native oxide removal. According to the location of the Cl 2p 3/2 peak, the Cl is ionically bonded." @default.
• W4308075631 created "2022-11-08" @default.
• W4308075631 creator A5020967437 @default.
• W4308075631 creator A5031835528 @default.
• W4308075631 creator A5047622902 @default.
• W4308075631 creator A5066656964 @default.
• W4308075631 creator A5085381025 @default.
• W4308075631 date "2022-11-01" @default.
• W4308075631 modified "2023-10-18" @default.
• W4308075631 title "Threshold Ion Energies and Cleaning of Etch Residues During Inductively Coupled Etching of NiO/Ga₂O₃ in BCl₃" @default.
• W4308075631 cites W1996413284 @default.
• W4308075631 cites W2046739467 @default.
• W4308075631 cites W2048814813 @default.
• W4308075631 cites W2076282496 @default.
• W4308075631 cites W2084073447 @default.
• W4308075631 cites W2127212879 @default.
• W4308075631 cites W2336753480 @default.
• W4308075631 cites W2609998380 @default.
• W4308075631 cites W2612602861 @default.
• W4308075631 cites W2762378799 @default.
• W4308075631 cites W2774293370 @default.
• W4308075631 cites W2775776374 @default.
• W4308075631 cites W2893777383 @default.
• W4308075631 cites W2954242241 @default.
• W4308075631 cites W2981577241 @default.
• W4308075631 cites W3000164404 @default.
• W4308075631 cites W3000408756 @default.
• W4308075631 cites W3004182793 @default.
• W4308075631 cites W3042514039 @default.
• W4308075631 cites W3047656237 @default.
• W4308075631 cites W3096398835 @default.
• W4308075631 cites W3122996276 @default.
• W4308075631 cites W3135295779 @default.
• W4308075631 cites W3138188852 @default.
• W4308075631 cites W3163500622 @default.
• W4308075631 cites W3164414943 @default.
• W4308075631 cites W3175557294 @default.
• W4308075631 cites W3198076162 @default.
• W4308075631 cites W3210047568 @default.
• W4308075631 cites W3214348394 @default.
• W4308075631 cites W3216249184 @default.
• W4308075631 cites W4214842737 @default.
• W4308075631 cites W4220838534 @default.
• W4308075631 cites W4220892771 @default.
• W4308075631 cites W4281729407 @default.
• W4308075631 cites W4285011169 @default.
• W4308075631 cites W4287959398 @default.
• W4308075631 cites W4297022393 @default.
• W4308075631 doi "https://doi.org/10.1149/2162-8777/ac9ff3" @default.
• W4308075631 hasPublicationYear "2022" @default.
• W4308075631 type Work @default.
• W4308075631 citedByCount "1" @default.
• W4308075631 countsByYear W43080756312023 @default.
• W4308075631 crossrefType "journal-article" @default.
• W4308075631 hasAuthorship W4308075631A5020967437 @default.
• W4308075631 hasAuthorship W4308075631A5031835528 @default.
• W4308075631 hasAuthorship W4308075631A5047622902 @default.
• W4308075631 hasAuthorship W4308075631A5066656964 @default.
• W4308075631 hasAuthorship W4308075631A5085381025 @default.
• W4308075631 hasConcept C100460472 @default.
• W4308075631 hasConcept C113196181 @default.
• W4308075631 hasConcept C121332964 @default.
• W4308075631 hasConcept C130472188 @default.
• W4308075631 hasConcept C145148216 @default.
• W4308075631 hasConcept C161790260 @default.
• W4308075631 hasConcept C171250308 @default.
• W4308075631 hasConcept C178790620 @default.
• W4308075631 hasConcept C185592680 @default.
• W4308075631 hasConcept C191897082 @default.
• W4308075631 hasConcept C192562407 @default.
• W4308075631 hasConcept C2779227376 @default.
• W4308075631 hasConcept C2779851234 @default.
• W4308075631 hasConcept C43617362 @default.
• W4308075631 hasConcept C49040817 @default.
• W4308075631 hasConcept C55493867 @default.
• W4308075631 hasConcept C62520636 @default.
• W4308075631 hasConcept C74575197 @default.
• W4308075631 hasConcept C79794668 @default.
• W4308075631 hasConcept C82706917 @default.
• W4308075631 hasConcept C95974651 @default.
• W4308075631 hasConceptScore W4308075631C100460472 @default.
• W4308075631 hasConceptScore W4308075631C113196181 @default.
• W4308075631 hasConceptScore W4308075631C121332964 @default.
• W4308075631 hasConceptScore W4308075631C130472188 @default.
• W4308075631 hasConceptScore W4308075631C145148216 @default.
• W4308075631 hasConceptScore W4308075631C161790260 @default.
• W4308075631 hasConceptScore W4308075631C171250308 @default.
• W4308075631 hasConceptScore W4308075631C178790620 @default.
• W4308075631 hasConceptScore W4308075631C185592680 @default.
• W4308075631 hasConceptScore W4308075631C191897082 @default.
• W4308075631 hasConceptScore W4308075631C192562407 @default.
• W4308075631 hasConceptScore W4308075631C2779227376 @default.
• W4308075631 hasConceptScore W4308075631C2779851234 @default.
• W4308075631 hasConceptScore W4308075631C43617362 @default.
• W4308075631 hasConceptScore W4308075631C49040817 @default.
• W4308075631 hasConceptScore W4308075631C55493867 @default.
• W4308075631 hasConceptScore W4308075631C62520636 @default.
• W4308075631 hasConceptScore W4308075631C74575197 @default.

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