Matches in SemOpenAlex for { <https://semopenalex.org/work/W4308333010> ?p ?o ?g. }
- W4308333010 endingPage "3890" @default.
- W4308333010 startingPage "3890" @default.
- W4308333010 abstract "Hafnium oxide (HfO2) thin film has remarkable physical and chemical properties, which makes it useful for a variety of applications. In this work, HfO2 films were prepared on silicon through plasma enhanced atomic layer deposition (PEALD) at various substrate temperatures. The growth per cycle, structural, morphology and crystalline properties of HfO2 films were measured by spectroscopic ellipsometer, grazing-incidence X-ray diffraction (GIXRD), X-ray reflectivity (XRR), field-emission scanning electron microscopy, atomic force microscopy and x-ray photoelectron spectroscopy. The substrate temperature dependent electrical properties of PEALD–HfO2 films were obtained by capacitance–voltage and current–voltage measurements. GIXRD patterns and XRR investigations show that increasing the substrate temperature improved the crystallinity and density of HfO2 films. The crystallinity of HfO2 films has a major effect on electrical properties of the films. HfO2 thin film deposited at 300 °C possesses the highest dielectric constant and breakdown electric field." @default.
- W4308333010 created "2022-11-11" @default.
- W4308333010 creator A5003298635 @default.
- W4308333010 creator A5018395388 @default.
- W4308333010 creator A5018987064 @default.
- W4308333010 creator A5026324052 @default.
- W4308333010 creator A5048708964 @default.
- W4308333010 creator A5074414194 @default.
- W4308333010 creator A5082213642 @default.
- W4308333010 creator A5083359702 @default.
- W4308333010 creator A5086817419 @default.
- W4308333010 date "2022-11-03" @default.
- W4308333010 modified "2023-10-18" @default.
- W4308333010 title "Crystallinity Effect on Electrical Properties of PEALD–HfO2 Thin Films Prepared by Different Substrate Temperatures" @default.
- W4308333010 cites W1971328361 @default.
- W4308333010 cites W1983436117 @default.
- W4308333010 cites W2004807283 @default.
- W4308333010 cites W2007005508 @default.
- W4308333010 cites W2058221257 @default.
- W4308333010 cites W2066140126 @default.
- W4308333010 cites W2149248689 @default.
- W4308333010 cites W2158932701 @default.
- W4308333010 cites W2192400406 @default.
- W4308333010 cites W2218718779 @default.
- W4308333010 cites W2226663485 @default.
- W4308333010 cites W2537984012 @default.
- W4308333010 cites W2565827167 @default.
- W4308333010 cites W2596604890 @default.
- W4308333010 cites W2611792592 @default.
- W4308333010 cites W2615099270 @default.
- W4308333010 cites W2622946377 @default.
- W4308333010 cites W2808242331 @default.
- W4308333010 cites W2923862685 @default.
- W4308333010 cites W2948880779 @default.
- W4308333010 cites W2974750550 @default.
- W4308333010 cites W2980202371 @default.
- W4308333010 cites W2989575635 @default.
- W4308333010 cites W2990050060 @default.
- W4308333010 cites W2990496128 @default.
- W4308333010 cites W2996284964 @default.
- W4308333010 cites W3005150913 @default.
- W4308333010 cites W3010099822 @default.
- W4308333010 cites W3016859021 @default.
- W4308333010 cites W3017794264 @default.
- W4308333010 cites W3035858694 @default.
- W4308333010 cites W3092142580 @default.
- W4308333010 cites W3101296421 @default.
- W4308333010 cites W3101648178 @default.
- W4308333010 cites W3111718542 @default.
- W4308333010 cites W3117900021 @default.
- W4308333010 cites W3152637302 @default.
- W4308333010 cites W3162234993 @default.
- W4308333010 cites W3180965327 @default.
- W4308333010 cites W3185823399 @default.
- W4308333010 cites W3187374068 @default.
- W4308333010 cites W3204446070 @default.
- W4308333010 cites W3212911793 @default.
- W4308333010 cites W3215605150 @default.
- W4308333010 cites W4200171283 @default.
- W4308333010 cites W4207048144 @default.
- W4308333010 cites W4220776504 @default.
- W4308333010 cites W4221025951 @default.
- W4308333010 cites W4221084887 @default.
- W4308333010 cites W4293339934 @default.
- W4308333010 cites W4294862364 @default.
- W4308333010 cites W602080126 @default.
- W4308333010 doi "https://doi.org/10.3390/nano12213890" @default.
- W4308333010 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/36364666" @default.
- W4308333010 hasPublicationYear "2022" @default.
- W4308333010 type Work @default.
- W4308333010 citedByCount "3" @default.
- W4308333010 countsByYear W43083330102023 @default.
- W4308333010 crossrefType "journal-article" @default.
- W4308333010 hasAuthorship W4308333010A5003298635 @default.
- W4308333010 hasAuthorship W4308333010A5018395388 @default.
- W4308333010 hasAuthorship W4308333010A5018987064 @default.
- W4308333010 hasAuthorship W4308333010A5026324052 @default.
- W4308333010 hasAuthorship W4308333010A5048708964 @default.
- W4308333010 hasAuthorship W4308333010A5074414194 @default.
- W4308333010 hasAuthorship W4308333010A5082213642 @default.
- W4308333010 hasAuthorship W4308333010A5083359702 @default.
- W4308333010 hasAuthorship W4308333010A5086817419 @default.
- W4308333010 hasBestOaLocation W43083330101 @default.
- W4308333010 hasConcept C111368507 @default.
- W4308333010 hasConcept C113196181 @default.
- W4308333010 hasConcept C127313418 @default.
- W4308333010 hasConcept C127413603 @default.
- W4308333010 hasConcept C133386390 @default.
- W4308333010 hasConcept C159985019 @default.
- W4308333010 hasConcept C171250308 @default.
- W4308333010 hasConcept C175708663 @default.
- W4308333010 hasConcept C18293161 @default.
- W4308333010 hasConcept C185592680 @default.
- W4308333010 hasConcept C19067145 @default.
- W4308333010 hasConcept C192562407 @default.
- W4308333010 hasConcept C2777289219 @default.
- W4308333010 hasConcept C42360764 @default.
- W4308333010 hasConcept C43617362 @default.