Matches in SemOpenAlex for { <https://semopenalex.org/work/W4308483954> ?p ?o ?g. }
- W4308483954 abstract "AlN thin films are enabling significant progress in modern optoelectronics, power electronics, and microelectromechanical systems. The various AlN growth methods and conditions lead to different film microstructures. In this report, phonon scattering mechanisms that impact the cross-plane (κz; along the c-axis) and in-plane (κr; parallel to the c-plane) thermal conductivities of AlN thin films prepared by various synthesis techniques are investigated. In contrast to bulk single crystal AlN with an isotropic thermal conductivity of ∼330 W/m K, a strong anisotropy in the thermal conductivity is observed in the thin films. The κz shows a strong film thickness dependence due to phonon-boundary scattering. Electron microscopy reveals the presence of grain boundaries and dislocations that limit the κr. For instance, oriented films prepared by reactive sputtering possess lateral crystalline grain sizes ranging from 20 to 40 nm that significantly lower the κr to ∼30 W/m K. Simulation results suggest that the self-heating in AlN film bulk acoustic resonators can significantly impact the power handling capability of RF filters. A device employing an oriented film as the active piezoelectric layer shows an ∼2.5× higher device peak temperature as compared to a device based on an epitaxial film." @default.
- W4308483954 created "2022-11-12" @default.
- W4308483954 creator A5004012801 @default.
- W4308483954 creator A5005850270 @default.
- W4308483954 creator A5010618439 @default.
- W4308483954 creator A5017221061 @default.
- W4308483954 creator A5020881331 @default.
- W4308483954 creator A5021130223 @default.
- W4308483954 creator A5025143855 @default.
- W4308483954 creator A5027556952 @default.
- W4308483954 creator A5027647826 @default.
- W4308483954 creator A5032028141 @default.
- W4308483954 creator A5034795566 @default.
- W4308483954 creator A5048701379 @default.
- W4308483954 creator A5049087428 @default.
- W4308483954 creator A5049285439 @default.
- W4308483954 creator A5051690297 @default.
- W4308483954 creator A5054105523 @default.
- W4308483954 creator A5057362202 @default.
- W4308483954 creator A5063183928 @default.
- W4308483954 creator A5064297158 @default.
- W4308483954 creator A5064788120 @default.
- W4308483954 creator A5065236570 @default.
- W4308483954 creator A5076781955 @default.
- W4308483954 creator A5079743771 @default.
- W4308483954 creator A5086599801 @default.
- W4308483954 creator A5086623260 @default.
- W4308483954 creator A5088141052 @default.
- W4308483954 creator A5088760104 @default.
- W4308483954 creator A5090636823 @default.
- W4308483954 date "2022-11-03" @default.
- W4308483954 modified "2023-09-26" @default.
- W4308483954 title "Growth-microstructure-thermal property relations in AlN thin films" @default.
- W4308483954 cites W1194156735 @default.
- W4308483954 cites W1964743486 @default.
- W4308483954 cites W1976705208 @default.
- W4308483954 cites W1985089047 @default.
- W4308483954 cites W1994684381 @default.
- W4308483954 cites W2004157914 @default.
- W4308483954 cites W2007762999 @default.
- W4308483954 cites W2009590881 @default.
- W4308483954 cites W2012099846 @default.
- W4308483954 cites W2017925122 @default.
- W4308483954 cites W2018409502 @default.
- W4308483954 cites W2020580497 @default.
- W4308483954 cites W2020653629 @default.
- W4308483954 cites W2030530528 @default.
- W4308483954 cites W2032261336 @default.
- W4308483954 cites W2035211902 @default.
- W4308483954 cites W2036784309 @default.
- W4308483954 cites W2048212765 @default.
- W4308483954 cites W2050196157 @default.
- W4308483954 cites W2050890807 @default.
- W4308483954 cites W2052301178 @default.
- W4308483954 cites W2062970180 @default.
- W4308483954 cites W2067244051 @default.
- W4308483954 cites W2067688095 @default.
- W4308483954 cites W2068366932 @default.
- W4308483954 cites W2078641765 @default.
- W4308483954 cites W2094737921 @default.
- W4308483954 cites W2098280679 @default.
- W4308483954 cites W2100506356 @default.
- W4308483954 cites W2101739496 @default.
- W4308483954 cites W2109021989 @default.
- W4308483954 cites W2109872583 @default.
- W4308483954 cites W2118192020 @default.
- W4308483954 cites W2148945027 @default.
- W4308483954 cites W2150108215 @default.
- W4308483954 cites W2153063279 @default.
- W4308483954 cites W2157126396 @default.
- W4308483954 cites W2328870699 @default.
- W4308483954 cites W2482201287 @default.
- W4308483954 cites W2513341029 @default.
- W4308483954 cites W2516931059 @default.
- W4308483954 cites W2568624883 @default.
- W4308483954 cites W2570628003 @default.
- W4308483954 cites W2573623341 @default.
- W4308483954 cites W2606003189 @default.
- W4308483954 cites W2740094999 @default.
- W4308483954 cites W2743598377 @default.
- W4308483954 cites W2743764621 @default.
- W4308483954 cites W2772829183 @default.
- W4308483954 cites W2790294021 @default.
- W4308483954 cites W2807743887 @default.
- W4308483954 cites W2891171294 @default.
- W4308483954 cites W2899146473 @default.
- W4308483954 cites W2903521455 @default.
- W4308483954 cites W2919742825 @default.
- W4308483954 cites W2923831016 @default.
- W4308483954 cites W2936028979 @default.
- W4308483954 cites W2940019293 @default.
- W4308483954 cites W2950173486 @default.
- W4308483954 cites W2952492789 @default.
- W4308483954 cites W2992731126 @default.
- W4308483954 cites W3000448774 @default.
- W4308483954 cites W3012791837 @default.
- W4308483954 cites W3030546871 @default.
- W4308483954 cites W3032358953 @default.
- W4308483954 cites W3047004641 @default.
- W4308483954 cites W3091619486 @default.