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- W4308536732 abstract "In this paper, we revisit how Smart Cut™ has played a major role to fabricated innovative substrates and how it can further enable heterogeneous integration for upcoming 2.5D/3D technologies. We demonstrate the unlimited possibilities of thin layer transfer, materials and stacking engineering to achieve best performance, energy efficient and cost-effective IC solutions for mobile communication, automotive and AIoT applications. All the learnings done and to come in substrate manufacturing will help the future of stacking at nanometer scale as we show first research implementation of the process into a CMOS flow." @default.
- W4308536732 created "2022-11-12" @default.
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- W4308536732 date "2022-09-21" @default.
- W4308536732 modified "2023-09-24" @default.
- W4308536732 title "Smart Cut<sup>™</sup> technology: from Substrate Enginnering to Advanced 3D Integration" @default.
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- W4308536732 doi "https://doi.org/10.1109/icicdt56182.2022.9933105" @default.
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