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- W4308651018 abstract "Next-Generation Lithography techniques such as Electron Beam Lithography (EBL), Multiple E-Beam Lithography (MEBL), and Extreme Ultraviolet Lithography (EUVL), overcome the limitations of 193 nm immersion lithography. In MEBL, the layout is split into vertical stripes, with the stripe boundaries termed stitch-lines, and thousands or even millions of electron beams (e-beams) are used in parallel for good throughput. Patterns in different stripes are written either by distinct e-beams or in different passes. Hence, patterns cut by stitch-lines suffer from overlay error and thereby severe pattern distortions, particularly Via, Vertical Routing, and Short Polygon violations near the stitch-lines. In this paper, we propose a Stitch-avoiding Detailed Router that reduces these violations. It is integrated with (i) a traditional global router, and (ii) a Stitch-avoiding Global Router. Experimental results for these two routing flows are compared with those of a baseline flow comprising a traditional global router followed by a traditional detailed router. Significant reductions in stitch-line violations are obtained, especially for the second routing flow, compared to the baseline flow." @default.
- W4308651018 created "2022-11-13" @default.
- W4308651018 creator A5007402679 @default.
- W4308651018 creator A5021904459 @default.
- W4308651018 creator A5026795499 @default.
- W4308651018 date "2022-10-03" @default.
- W4308651018 modified "2023-09-27" @default.
- W4308651018 title "Stitch-avoiding Detailed Routing for Multiple E-Beam Lithography" @default.
- W4308651018 cites W1525696892 @default.
- W4308651018 cites W2021153780 @default.
- W4308651018 cites W2022373121 @default.
- W4308651018 cites W2046079692 @default.
- W4308651018 cites W2143286762 @default.
- W4308651018 cites W2159101915 @default.
- W4308651018 cites W2167190617 @default.
- W4308651018 cites W2202182110 @default.
- W4308651018 cites W2769031336 @default.
- W4308651018 cites W3090836118 @default.
- W4308651018 cites W4295791142 @default.
- W4308651018 cites W2589450675 @default.
- W4308651018 doi "https://doi.org/10.1109/vlsi-soc54400.2022.9939588" @default.
- W4308651018 hasPublicationYear "2022" @default.
- W4308651018 type Work @default.
- W4308651018 citedByCount "0" @default.
- W4308651018 crossrefType "proceedings-article" @default.
- W4308651018 hasAuthorship W4308651018A5007402679 @default.
- W4308651018 hasAuthorship W4308651018A5021904459 @default.
- W4308651018 hasAuthorship W4308651018A5026795499 @default.
- W4308651018 hasConcept C120665830 @default.
- W4308651018 hasConcept C121332964 @default.
- W4308651018 hasConcept C126042441 @default.
- W4308651018 hasConcept C127413603 @default.
- W4308651018 hasConcept C136085584 @default.
- W4308651018 hasConcept C149635348 @default.
- W4308651018 hasConcept C157764524 @default.
- W4308651018 hasConcept C162996421 @default.
- W4308651018 hasConcept C171250308 @default.
- W4308651018 hasConcept C177409738 @default.
- W4308651018 hasConcept C190694206 @default.
- W4308651018 hasConcept C192562407 @default.
- W4308651018 hasConcept C199360897 @default.
- W4308651018 hasConcept C200274948 @default.
- W4308651018 hasConcept C204223013 @default.
- W4308651018 hasConcept C24326235 @default.
- W4308651018 hasConcept C2775896111 @default.
- W4308651018 hasConcept C2779227376 @default.
- W4308651018 hasConcept C31258907 @default.
- W4308651018 hasConcept C41008148 @default.
- W4308651018 hasConcept C53524968 @default.
- W4308651018 hasConcept C555944384 @default.
- W4308651018 hasConcept C74172769 @default.
- W4308651018 hasConcept C76155785 @default.
- W4308651018 hasConcept C94263209 @default.
- W4308651018 hasConceptScore W4308651018C120665830 @default.
- W4308651018 hasConceptScore W4308651018C121332964 @default.
- W4308651018 hasConceptScore W4308651018C126042441 @default.
- W4308651018 hasConceptScore W4308651018C127413603 @default.
- W4308651018 hasConceptScore W4308651018C136085584 @default.
- W4308651018 hasConceptScore W4308651018C149635348 @default.
- W4308651018 hasConceptScore W4308651018C157764524 @default.
- W4308651018 hasConceptScore W4308651018C162996421 @default.
- W4308651018 hasConceptScore W4308651018C171250308 @default.
- W4308651018 hasConceptScore W4308651018C177409738 @default.
- W4308651018 hasConceptScore W4308651018C190694206 @default.
- W4308651018 hasConceptScore W4308651018C192562407 @default.
- W4308651018 hasConceptScore W4308651018C199360897 @default.
- W4308651018 hasConceptScore W4308651018C200274948 @default.
- W4308651018 hasConceptScore W4308651018C204223013 @default.
- W4308651018 hasConceptScore W4308651018C24326235 @default.
- W4308651018 hasConceptScore W4308651018C2775896111 @default.
- W4308651018 hasConceptScore W4308651018C2779227376 @default.
- W4308651018 hasConceptScore W4308651018C31258907 @default.
- W4308651018 hasConceptScore W4308651018C41008148 @default.
- W4308651018 hasConceptScore W4308651018C53524968 @default.
- W4308651018 hasConceptScore W4308651018C555944384 @default.
- W4308651018 hasConceptScore W4308651018C74172769 @default.
- W4308651018 hasConceptScore W4308651018C76155785 @default.
- W4308651018 hasConceptScore W4308651018C94263209 @default.
- W4308651018 hasLocation W43086510181 @default.
- W4308651018 hasOpenAccess W4308651018 @default.
- W4308651018 hasPrimaryLocation W43086510181 @default.
- W4308651018 hasRelatedWork W1937820206 @default.
- W4308651018 hasRelatedWork W1996426988 @default.
- W4308651018 hasRelatedWork W2054704405 @default.
- W4308651018 hasRelatedWork W2055541636 @default.
- W4308651018 hasRelatedWork W2077286051 @default.
- W4308651018 hasRelatedWork W2089259287 @default.
- W4308651018 hasRelatedWork W2532316647 @default.
- W4308651018 hasRelatedWork W2599482221 @default.
- W4308651018 hasRelatedWork W4281746028 @default.
- W4308651018 hasRelatedWork W4308651018 @default.
- W4308651018 isParatext "false" @default.
- W4308651018 isRetracted "false" @default.
- W4308651018 workType "article" @default.