Matches in SemOpenAlex for { <https://semopenalex.org/work/W4308740085> ?p ?o ?g. }
- W4308740085 endingPage "139571" @default.
- W4308740085 startingPage "139571" @default.
- W4308740085 abstract "High quality single crystal diamond builds the foundation for the applications in high-power, high-frequency electronic devices. In this paper, high-quality (100) single-crystal diamond film grown by microwave plasma chemical vapor deposition (MPCVD) was studied. By optimizing the pre-etching process before growth, where the distance between the substrate and plasma plays an important role, high-quality chemical vapor deposition (CVD) diamond layer with a smooth surface can be acquired. The root-mean-square roughness of CVD diamond surface was reduced to 0.2 nm ∼ 0.5 nm within 5 μm × 5 μm area while maintaining the growth at a high rate of 3 μm/h ∼ 30 μm/h. The sheet resistance of the CVD diamond layer was 6.1 kΩ/sq by transmission line method, indicating a high potential to fabricate high-performance hydrogen-terminal diamond-based electronic devices." @default.
- W4308740085 created "2022-11-15" @default.
- W4308740085 creator A5010047420 @default.
- W4308740085 creator A5047901745 @default.
- W4308740085 creator A5048826252 @default.
- W4308740085 creator A5051643290 @default.
- W4308740085 creator A5052342599 @default.
- W4308740085 creator A5066986562 @default.
- W4308740085 creator A5083967189 @default.
- W4308740085 creator A5091076746 @default.
- W4308740085 date "2022-12-01" @default.
- W4308740085 modified "2023-10-16" @default.
- W4308740085 title "High-rate growth of single-crystal diamond with an atomically flat surface by microwave plasma chemical vapor deposition" @default.
- W4308740085 cites W1973309066 @default.
- W4308740085 cites W1986003091 @default.
- W4308740085 cites W1990992831 @default.
- W4308740085 cites W2008228919 @default.
- W4308740085 cites W2062178530 @default.
- W4308740085 cites W2062540850 @default.
- W4308740085 cites W2087414453 @default.
- W4308740085 cites W2137799406 @default.
- W4308740085 cites W2170585368 @default.
- W4308740085 cites W2765406950 @default.
- W4308740085 cites W2990965403 @default.
- W4308740085 cites W3005904168 @default.
- W4308740085 cites W3113710265 @default.
- W4308740085 cites W3197576153 @default.
- W4308740085 cites W3199450105 @default.
- W4308740085 doi "https://doi.org/10.1016/j.tsf.2022.139571" @default.
- W4308740085 hasPublicationYear "2022" @default.
- W4308740085 type Work @default.
- W4308740085 citedByCount "3" @default.
- W4308740085 countsByYear W43087400852023 @default.
- W4308740085 crossrefType "journal-article" @default.
- W4308740085 hasAuthorship W4308740085A5010047420 @default.
- W4308740085 hasAuthorship W4308740085A5047901745 @default.
- W4308740085 hasAuthorship W4308740085A5048826252 @default.
- W4308740085 hasAuthorship W4308740085A5051643290 @default.
- W4308740085 hasAuthorship W4308740085A5052342599 @default.
- W4308740085 hasAuthorship W4308740085A5066986562 @default.
- W4308740085 hasAuthorship W4308740085A5083967189 @default.
- W4308740085 hasAuthorship W4308740085A5091076746 @default.
- W4308740085 hasConcept C100460472 @default.
- W4308740085 hasConcept C107365816 @default.
- W4308740085 hasConcept C111368507 @default.
- W4308740085 hasConcept C121332964 @default.
- W4308740085 hasConcept C127313418 @default.
- W4308740085 hasConcept C159985019 @default.
- W4308740085 hasConcept C162882748 @default.
- W4308740085 hasConcept C171250308 @default.
- W4308740085 hasConcept C192562407 @default.
- W4308740085 hasConcept C199360897 @default.
- W4308740085 hasConcept C2776921476 @default.
- W4308740085 hasConcept C2777289219 @default.
- W4308740085 hasConcept C2779227376 @default.
- W4308740085 hasConcept C2781285689 @default.
- W4308740085 hasConcept C38347018 @default.
- W4308740085 hasConcept C41008148 @default.
- W4308740085 hasConcept C44838205 @default.
- W4308740085 hasConcept C49040817 @default.
- W4308740085 hasConcept C57410435 @default.
- W4308740085 hasConcept C62520636 @default.
- W4308740085 hasConcept C71039073 @default.
- W4308740085 hasConceptScore W4308740085C100460472 @default.
- W4308740085 hasConceptScore W4308740085C107365816 @default.
- W4308740085 hasConceptScore W4308740085C111368507 @default.
- W4308740085 hasConceptScore W4308740085C121332964 @default.
- W4308740085 hasConceptScore W4308740085C127313418 @default.
- W4308740085 hasConceptScore W4308740085C159985019 @default.
- W4308740085 hasConceptScore W4308740085C162882748 @default.
- W4308740085 hasConceptScore W4308740085C171250308 @default.
- W4308740085 hasConceptScore W4308740085C192562407 @default.
- W4308740085 hasConceptScore W4308740085C199360897 @default.
- W4308740085 hasConceptScore W4308740085C2776921476 @default.
- W4308740085 hasConceptScore W4308740085C2777289219 @default.
- W4308740085 hasConceptScore W4308740085C2779227376 @default.
- W4308740085 hasConceptScore W4308740085C2781285689 @default.
- W4308740085 hasConceptScore W4308740085C38347018 @default.
- W4308740085 hasConceptScore W4308740085C41008148 @default.
- W4308740085 hasConceptScore W4308740085C44838205 @default.
- W4308740085 hasConceptScore W4308740085C49040817 @default.
- W4308740085 hasConceptScore W4308740085C57410435 @default.
- W4308740085 hasConceptScore W4308740085C62520636 @default.
- W4308740085 hasConceptScore W4308740085C71039073 @default.
- W4308740085 hasFunder F4320321001 @default.
- W4308740085 hasFunder F4320322769 @default.
- W4308740085 hasFunder F4320330484 @default.
- W4308740085 hasLocation W43087400851 @default.
- W4308740085 hasOpenAccess W4308740085 @default.
- W4308740085 hasPrimaryLocation W43087400851 @default.
- W4308740085 hasRelatedWork W1996323756 @default.
- W4308740085 hasRelatedWork W2020309461 @default.
- W4308740085 hasRelatedWork W2042618982 @default.
- W4308740085 hasRelatedWork W2061769906 @default.
- W4308740085 hasRelatedWork W2085976629 @default.
- W4308740085 hasRelatedWork W2129519617 @default.
- W4308740085 hasRelatedWork W2324643660 @default.
- W4308740085 hasRelatedWork W2930620403 @default.