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- W4308789971 abstract "With EUV attenuated phase shift absorbers rapidly approaching maturity, actinic metrology previously developed at scientific facilities must be transferred to high volume manufacturing. We explore the performance of actinic phase metrology with reflectometry and scatterometry, using either a synchrotron light source at a scientific facility, or a plasma light source in a commercial tool. We assess the impact of challenges from temporal and spatial coherence, throughput, and measurement noise. We present simulations and experiments to compare the performance of the Center for X-Ray Optics reflectometry and scattering beamline with the EUV Tech ENK reflectometry and scattering tool." @default.
- W4308789971 created "2022-11-15" @default.
- W4308789971 creator A5041451481 @default.
- W4308789971 date "2022-11-11" @default.
- W4308789971 modified "2023-09-26" @default.
- W4308789971 title "Actinic EUV reflectometry and scatterometry: from national lab to commercial applications" @default.
- W4308789971 doi "https://doi.org/10.1117/12.2643550" @default.
- W4308789971 hasPublicationYear "2022" @default.
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