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- W4309736721 abstract "For constructing optical and electrical micro-devices, the deposition/printing of materials with sub-1 μm precision and size (cross-section) is required. Crystalline c-ITO (indium tin oxide) nanostructures were patterned on glass with sufficient precision to form 20-50 nm gaps between individual disks or lines of ∼250 nm diameter or width. The absorbed energy density [J/cm3] followed a second-order dependence on pulse energy. This facilitated high-resolution and precise nanoscale laser-writing at a laser wavelength of 515 nm. Patterns for optical elements such as circular gratings and micro-disks were laser-printed using ITO as a resist. Unexposed amorphous a-ITO was chemically removed in aqueous 1% vol. HF solution. This use of a-ITO as a solid resist holds promise for metamaterial and micro-optical applications." @default.
- W4309736721 created "2022-11-29" @default.
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- W4309736721 date "2022-11-21" @default.
- W4309736721 modified "2023-10-13" @default.
- W4309736721 title "Nanoscale Printing of Indium-Tin-Oxide by Femtosecond Laser Pulses" @default.
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- W4309736721 doi "https://doi.org/10.3390/nano12224092" @default.
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