Matches in SemOpenAlex for { <https://semopenalex.org/work/W4309760249> ?p ?o ?g. }
- W4309760249 abstract "In this work, we use Si/Tl5Al1/TiN for a source/drain ohmic contact to demonstrate an ultra-low contact resistance of 0.11 Ω mm (ρc = 2.62 × 10−7 Ω cm2) on non-recessed i-InAlN/GaN heterostructures. The Ti5Al1 alloy was used to suppress the out-diffusion of Al and extract N from the InAlN layer, which aided the formation of ohmic contact by improving the tunneling efficiency of electrons, as we have reported in the past work. A thin Si inter-layer combined with the Ti5Al1 alloy is proposed to further reduce contact resistance. A heavy n-type InAlN layer was obtained through doping with Si atoms to improve the tunneling transport of electrons. Furthermore, the TiN inclusions penetrated into the GaN channel because the in-diffused Si promoted the decomposition of GaN at a high annealing temperature and the in-diffused Ti reacted with GaN. These TiN inclusions provided direct contact with two-dimensional electron gas, offering an additional path for the injection of electrons into the channel. The tunneling and spike mechanism worked alternately to lower the contact resistance at different annealing temperatures (dividing at 900 °C), implying that the joint effect of tunneling and the spike mechanism was initially promoted in the formation of ohmic contact. The mechanism of this Si/Ti5Al1/TiN ohmic contact was fully understood through microscopic and thermodynamic analyses. These results shed light on the mechanism for the formation of ohmic contact in a gold-free metal stack for GaN-based HEMTs." @default.
- W4309760249 created "2022-11-29" @default.
- W4309760249 creator A5001668638 @default.
- W4309760249 creator A5008210617 @default.
- W4309760249 creator A5025831733 @default.
- W4309760249 creator A5051146073 @default.
- W4309760249 creator A5056545401 @default.
- W4309760249 creator A5059277612 @default.
- W4309760249 creator A5067933839 @default.
- W4309760249 creator A5083870128 @default.
- W4309760249 creator A5090042508 @default.
- W4309760249 date "2022-11-21" @default.
- W4309760249 modified "2023-10-16" @default.
- W4309760249 title "Microscopic formation mechanism of Si/Tl<sub>5</sub>Al<sub>1</sub>/TiN ohmic contact on non-recessed i-InAlN/GaN heterostructures with ultra-low resistance" @default.
- W4309760249 cites W1485115052 @default.
- W4309760249 cites W1576320143 @default.
- W4309760249 cites W1668532387 @default.
- W4309760249 cites W1963786711 @default.
- W4309760249 cites W1969872334 @default.
- W4309760249 cites W1974896130 @default.
- W4309760249 cites W1976513495 @default.
- W4309760249 cites W1978079493 @default.
- W4309760249 cites W1987184771 @default.
- W4309760249 cites W1992106946 @default.
- W4309760249 cites W2000520195 @default.
- W4309760249 cites W2020870286 @default.
- W4309760249 cites W2022016471 @default.
- W4309760249 cites W2027905407 @default.
- W4309760249 cites W2029197316 @default.
- W4309760249 cites W2050535265 @default.
- W4309760249 cites W2063781729 @default.
- W4309760249 cites W2067774178 @default.
- W4309760249 cites W2077997676 @default.
- W4309760249 cites W2081791911 @default.
- W4309760249 cites W2084824986 @default.
- W4309760249 cites W2095354758 @default.
- W4309760249 cites W2097322072 @default.
- W4309760249 cites W2104325811 @default.
- W4309760249 cites W2126554651 @default.
- W4309760249 cites W2133615312 @default.
- W4309760249 cites W2141891416 @default.
- W4309760249 cites W2142699783 @default.
- W4309760249 cites W2162857337 @default.
- W4309760249 cites W2164834175 @default.
- W4309760249 cites W2167800447 @default.
- W4309760249 cites W2335313951 @default.
- W4309760249 cites W2340378496 @default.
- W4309760249 cites W2553924329 @default.
- W4309760249 cites W2603880607 @default.
- W4309760249 cites W2769635430 @default.
- W4309760249 cites W2803636492 @default.
- W4309760249 cites W2982768886 @default.
- W4309760249 cites W3047083441 @default.
- W4309760249 cites W3082141610 @default.
- W4309760249 cites W3121966729 @default.
- W4309760249 cites W3128919628 @default.
- W4309760249 doi "https://doi.org/10.1063/5.0117205" @default.
- W4309760249 hasPublicationYear "2022" @default.
- W4309760249 type Work @default.
- W4309760249 citedByCount "0" @default.
- W4309760249 crossrefType "journal-article" @default.
- W4309760249 hasAuthorship W4309760249A5001668638 @default.
- W4309760249 hasAuthorship W4309760249A5008210617 @default.
- W4309760249 hasAuthorship W4309760249A5025831733 @default.
- W4309760249 hasAuthorship W4309760249A5051146073 @default.
- W4309760249 hasAuthorship W4309760249A5056545401 @default.
- W4309760249 hasAuthorship W4309760249A5059277612 @default.
- W4309760249 hasAuthorship W4309760249A5067933839 @default.
- W4309760249 hasAuthorship W4309760249A5083870128 @default.
- W4309760249 hasAuthorship W4309760249A5090042508 @default.
- W4309760249 hasBestOaLocation W43097602491 @default.
- W4309760249 hasConcept C120398109 @default.
- W4309760249 hasConcept C123671423 @default.
- W4309760249 hasConcept C138230450 @default.
- W4309760249 hasConcept C171250308 @default.
- W4309760249 hasConcept C191897082 @default.
- W4309760249 hasConcept C192562407 @default.
- W4309760249 hasConcept C2777855556 @default.
- W4309760249 hasConcept C2779227376 @default.
- W4309760249 hasConcept C2780026712 @default.
- W4309760249 hasConcept C49040817 @default.
- W4309760249 hasConcept C525849907 @default.
- W4309760249 hasConcept C57863236 @default.
- W4309760249 hasConcept C79794668 @default.
- W4309760249 hasConceptScore W4309760249C120398109 @default.
- W4309760249 hasConceptScore W4309760249C123671423 @default.
- W4309760249 hasConceptScore W4309760249C138230450 @default.
- W4309760249 hasConceptScore W4309760249C171250308 @default.
- W4309760249 hasConceptScore W4309760249C191897082 @default.
- W4309760249 hasConceptScore W4309760249C192562407 @default.
- W4309760249 hasConceptScore W4309760249C2777855556 @default.
- W4309760249 hasConceptScore W4309760249C2779227376 @default.
- W4309760249 hasConceptScore W4309760249C2780026712 @default.
- W4309760249 hasConceptScore W4309760249C49040817 @default.
- W4309760249 hasConceptScore W4309760249C525849907 @default.
- W4309760249 hasConceptScore W4309760249C57863236 @default.
- W4309760249 hasConceptScore W4309760249C79794668 @default.
- W4309760249 hasFunder F4320321001 @default.
- W4309760249 hasIssue "21" @default.
- W4309760249 hasLocation W43097602491 @default.