Matches in SemOpenAlex for { <https://semopenalex.org/work/W4309787629> ?p ?o ?g. }
- W4309787629 endingPage "2024" @default.
- W4309787629 startingPage "2024" @default.
- W4309787629 abstract "We prepared an indium-free metal oxide thin-film transistor (TFT) using a double-active-layers structure at room temperature. We changed the growth sequence of Al-doped zinc oxide (AZO) and zinc oxide (ZnO) double-active-layers on Si/SiO2 substrates by magnetron sputtering deposition to regulate the field-effect performance of TFTs. According to the analysis of field-effect properties before and after annealing in different atmospheres, the performance of TFT devices with ZnO/AZO/SiO2/Si double-active-layers was obviously better than that with single AZO or ZnO active layer and inverted AZO/ZnO/SiO2/Si double-active-layers in the device structure. The active layer with higher carrier concentration (AZO in this case) was closer to the dielectric layer, which was more favorable for carrier regulation in TFT devices. In addition, the annealed device had a lower on/off ratio (Ion/Ioff), easier-to-reach on-state, and higher mobility. Furthermore, the performance of the devices annealed under vacuum condition was obviously better than that annealed under air atmosphere. The Ion/Ioff could reach 6.8 × 105 and the threshold voltage was only 2.9 V." @default.
- W4309787629 created "2022-11-29" @default.
- W4309787629 creator A5010431648 @default.
- W4309787629 creator A5031172867 @default.
- W4309787629 creator A5033771107 @default.
- W4309787629 creator A5034995105 @default.
- W4309787629 creator A5040446890 @default.
- W4309787629 creator A5046744374 @default.
- W4309787629 creator A5052272042 @default.
- W4309787629 creator A5055838753 @default.
- W4309787629 creator A5067840107 @default.
- W4309787629 date "2022-11-19" @default.
- W4309787629 modified "2023-09-25" @default.
- W4309787629 title "Performance Enhancement for Indium-Free Metal Oxide Thin-Film Transistors with Double-Active-Layers by Magnetron Sputtering at Room Temperature" @default.
- W4309787629 cites W1967107943 @default.
- W4309787629 cites W1969443209 @default.
- W4309787629 cites W1976250511 @default.
- W4309787629 cites W1982968328 @default.
- W4309787629 cites W1994277498 @default.
- W4309787629 cites W1995726278 @default.
- W4309787629 cites W1999589524 @default.
- W4309787629 cites W1999665858 @default.
- W4309787629 cites W2001827620 @default.
- W4309787629 cites W2015638039 @default.
- W4309787629 cites W2018540978 @default.
- W4309787629 cites W2035703289 @default.
- W4309787629 cites W2043696360 @default.
- W4309787629 cites W2049817780 @default.
- W4309787629 cites W2055146671 @default.
- W4309787629 cites W2065038191 @default.
- W4309787629 cites W2078624450 @default.
- W4309787629 cites W2078679116 @default.
- W4309787629 cites W2092426063 @default.
- W4309787629 cites W2134960271 @default.
- W4309787629 cites W2167088931 @default.
- W4309787629 cites W2312969497 @default.
- W4309787629 cites W2321502359 @default.
- W4309787629 cites W2321631602 @default.
- W4309787629 cites W2583557691 @default.
- W4309787629 cites W2888778400 @default.
- W4309787629 cites W2955533223 @default.
- W4309787629 cites W2981843223 @default.
- W4309787629 cites W2992030383 @default.
- W4309787629 cites W3038348692 @default.
- W4309787629 cites W3039279398 @default.
- W4309787629 cites W3157031698 @default.
- W4309787629 cites W3178167419 @default.
- W4309787629 cites W3184912596 @default.
- W4309787629 cites W3187013529 @default.
- W4309787629 cites W3196935834 @default.
- W4309787629 cites W4226505435 @default.
- W4309787629 doi "https://doi.org/10.3390/mi13112024" @default.
- W4309787629 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/36422452" @default.
- W4309787629 hasPublicationYear "2022" @default.
- W4309787629 type Work @default.
- W4309787629 citedByCount "0" @default.
- W4309787629 crossrefType "journal-article" @default.
- W4309787629 hasAuthorship W4309787629A5010431648 @default.
- W4309787629 hasAuthorship W4309787629A5031172867 @default.
- W4309787629 hasAuthorship W4309787629A5033771107 @default.
- W4309787629 hasAuthorship W4309787629A5034995105 @default.
- W4309787629 hasAuthorship W4309787629A5040446890 @default.
- W4309787629 hasAuthorship W4309787629A5046744374 @default.
- W4309787629 hasAuthorship W4309787629A5052272042 @default.
- W4309787629 hasAuthorship W4309787629A5055838753 @default.
- W4309787629 hasAuthorship W4309787629A5067840107 @default.
- W4309787629 hasBestOaLocation W43097876291 @default.
- W4309787629 hasConcept C119599485 @default.
- W4309787629 hasConcept C127413603 @default.
- W4309787629 hasConcept C133386390 @default.
- W4309787629 hasConcept C162743726 @default.
- W4309787629 hasConcept C165801399 @default.
- W4309787629 hasConcept C171250308 @default.
- W4309787629 hasConcept C172385210 @default.
- W4309787629 hasConcept C19067145 @default.
- W4309787629 hasConcept C191897082 @default.
- W4309787629 hasConcept C192562407 @default.
- W4309787629 hasConcept C22423302 @default.
- W4309787629 hasConcept C2776026197 @default.
- W4309787629 hasConcept C2777855556 @default.
- W4309787629 hasConcept C2779227376 @default.
- W4309787629 hasConcept C2779851234 @default.
- W4309787629 hasConcept C49040817 @default.
- W4309787629 hasConcept C543292547 @default.
- W4309787629 hasConcept C57863236 @default.
- W4309787629 hasConcept C61427134 @default.
- W4309787629 hasConcept C87359718 @default.
- W4309787629 hasConceptScore W4309787629C119599485 @default.
- W4309787629 hasConceptScore W4309787629C127413603 @default.
- W4309787629 hasConceptScore W4309787629C133386390 @default.
- W4309787629 hasConceptScore W4309787629C162743726 @default.
- W4309787629 hasConceptScore W4309787629C165801399 @default.
- W4309787629 hasConceptScore W4309787629C171250308 @default.
- W4309787629 hasConceptScore W4309787629C172385210 @default.
- W4309787629 hasConceptScore W4309787629C19067145 @default.
- W4309787629 hasConceptScore W4309787629C191897082 @default.
- W4309787629 hasConceptScore W4309787629C192562407 @default.
- W4309787629 hasConceptScore W4309787629C22423302 @default.