FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4309796661> ?p ?o ?g. }

• W4309796661 endingPage "127008" @default.
• W4309796661 startingPage "127008" @default.
• W4309796661 abstract "4H-SiC has excellent physical and chemical properties such as wide band gap and high electron mobility and can be used in microwave and radio frequency devices. Epitaxial layer on semi-insulating (SI) substrate of 4H-SiC is a key structure for the fabrication of radio frequency devices. However, two-dimensional growth easily occurs during the epitaxy process to form 3C-SiC. Therefore, it is necessary to study the crystal polytype change in the epitaxial layer. This paper studied the effect of temperature on the epitaxial layer during epitaxy on 4H-SiC SI substrates using trichlorosilane and ethylene as source gases. The Si-face and the C-face were respectively selected as the growth planes, and the temperature varied in the range of 1400℃–1600℃. The samples were characterized using optical microscopy, atomic force microscopy, and Raman spectroscopy. The surface topography obtained by epitaxial growth was uniform, and the surface roughness of the smooth region was less than 1.0 nm. 3C-SiC was obtained at low temperature, and 4H-SiC was obtained at higher temperature." @default.
• W4309796661 created "2022-11-29" @default.
• W4309796661 creator A5010389876 @default.
• W4309796661 creator A5019954912 @default.
• W4309796661 creator A5037808552 @default.
• W4309796661 creator A5041000097 @default.
• W4309796661 creator A5057802244 @default.
• W4309796661 creator A5058903146 @default.
• W4309796661 creator A5067082665 @default.
• W4309796661 creator A5071235043 @default.
• W4309796661 creator A5073216396 @default.
• W4309796661 creator A5073548180 @default.
• W4309796661 date "2023-02-01" @default.
• W4309796661 modified "2023-10-18" @default.
• W4309796661 title "Effect of temperature on growth of epitaxial layer on semi-insulating 4H-SiC substrate" @default.
• W4309796661 cites W1874443211 @default.
• W4309796661 cites W1974661507 @default.
• W4309796661 cites W1986777845 @default.
• W4309796661 cites W1987204607 @default.
• W4309796661 cites W1994871392 @default.
• W4309796661 cites W2025620311 @default.
• W4309796661 cites W2110734859 @default.
• W4309796661 cites W2735962428 @default.
• W4309796661 cites W2737446922 @default.
• W4309796661 cites W2776383164 @default.
• W4309796661 cites W2971852868 @default.
• W4309796661 cites W2980423549 @default.
• W4309796661 cites W3003540342 @default.
• W4309796661 cites W3011228094 @default.
• W4309796661 cites W3031772070 @default.
• W4309796661 cites W3038038542 @default.
• W4309796661 cites W3118039640 @default.
• W4309796661 cites W3168397062 @default.
• W4309796661 cites W4206450235 @default.
• W4309796661 cites W4207002728 @default.
• W4309796661 doi "https://doi.org/10.1016/j.jcrysgro.2022.127008" @default.
• W4309796661 hasPublicationYear "2023" @default.
• W4309796661 type Work @default.
• W4309796661 citedByCount "1" @default.
• W4309796661 countsByYear W43097966612023 @default.
• W4309796661 crossrefType "journal-article" @default.
• W4309796661 hasAuthorship W4309796661A5010389876 @default.
• W4309796661 hasAuthorship W4309796661A5019954912 @default.
• W4309796661 hasAuthorship W4309796661A5037808552 @default.
• W4309796661 hasAuthorship W4309796661A5041000097 @default.
• W4309796661 hasAuthorship W4309796661A5057802244 @default.
• W4309796661 hasAuthorship W4309796661A5058903146 @default.
• W4309796661 hasAuthorship W4309796661A5067082665 @default.
• W4309796661 hasAuthorship W4309796661A5071235043 @default.
• W4309796661 hasAuthorship W4309796661A5073216396 @default.
• W4309796661 hasAuthorship W4309796661A5073548180 @default.
• W4309796661 hasConcept C107365816 @default.
• W4309796661 hasConcept C110738630 @default.
• W4309796661 hasConcept C111368507 @default.
• W4309796661 hasConcept C120665830 @default.
• W4309796661 hasConcept C121332964 @default.
• W4309796661 hasConcept C127313418 @default.
• W4309796661 hasConcept C153294291 @default.
• W4309796661 hasConcept C159985019 @default.
• W4309796661 hasConcept C171250308 @default.
• W4309796661 hasConcept C192562407 @default.
• W4309796661 hasConcept C2777289219 @default.
• W4309796661 hasConcept C2779227376 @default.
• W4309796661 hasConcept C39353612 @default.
• W4309796661 hasConcept C40003534 @default.
• W4309796661 hasConcept C49040817 @default.
• W4309796661 hasConceptScore W4309796661C107365816 @default.
• W4309796661 hasConceptScore W4309796661C110738630 @default.
• W4309796661 hasConceptScore W4309796661C111368507 @default.
• W4309796661 hasConceptScore W4309796661C120665830 @default.
• W4309796661 hasConceptScore W4309796661C121332964 @default.
• W4309796661 hasConceptScore W4309796661C127313418 @default.
• W4309796661 hasConceptScore W4309796661C153294291 @default.
• W4309796661 hasConceptScore W4309796661C159985019 @default.
• W4309796661 hasConceptScore W4309796661C171250308 @default.
• W4309796661 hasConceptScore W4309796661C192562407 @default.
• W4309796661 hasConceptScore W4309796661C2777289219 @default.
• W4309796661 hasConceptScore W4309796661C2779227376 @default.
• W4309796661 hasConceptScore W4309796661C39353612 @default.
• W4309796661 hasConceptScore W4309796661C40003534 @default.
• W4309796661 hasConceptScore W4309796661C49040817 @default.
• W4309796661 hasFunder F4320321001 @default.
• W4309796661 hasFunder F4320321540 @default.
• W4309796661 hasFunder F4320335777 @default.
• W4309796661 hasFunder F4320336405 @default.
• W4309796661 hasLocation W43097966611 @default.
• W4309796661 hasOpenAccess W4309796661 @default.
• W4309796661 hasPrimaryLocation W43097966611 @default.
• W4309796661 hasRelatedWork W1970801993 @default.
• W4309796661 hasRelatedWork W2033603555 @default.
• W4309796661 hasRelatedWork W2055754760 @default.
• W4309796661 hasRelatedWork W2091934482 @default.
• W4309796661 hasRelatedWork W2139871202 @default.
• W4309796661 hasRelatedWork W2374233278 @default.
• W4309796661 hasRelatedWork W2610935894 @default.
• W4309796661 hasRelatedWork W2914704993 @default.
• W4309796661 hasRelatedWork W3115037099 @default.
• W4309796661 hasRelatedWork W4244317816 @default.

• next