FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4309944595> ?p ?o ?g. }

• W4309944595 abstract "Abstract Advances in modern semiconductor integrated circuits have always demanded faster and more sensitive analytical methods on a large-scale wafer. The surface of wafers is fundamentally essential to start building circuits, and quantitative measures of the surface potential, defects, contamination, passivation quality, and uniformity are subject to inspection. The present study provides a new approach to access those by means of terahertz (THz) emission spectroscopy. Upon femtosecond laser illumination, THz radiation, which is sensitive to the surface electric fields of the wafer, is generated. Here, we systematically research the THz emission properties of silicon surfaces under different surface conditions, such as the initial surface with a native oxide layer, a fluorine-terminated surface, and a hydrogen-terminated surface. Meanwhile, a strong doping concentration dependence of the THz emission amplitude from the silicon surface has been revealed in different surface conditions, which implies a semiquantitative connection between the THz emission and the surface band bending with the surface dipoles. Laser-induced THz emission spectroscopy is a promising method for evaluating local surface properties on a wafer scale." @default.
• W4309944595 created "2022-11-30" @default.
• W4309944595 creator A5023833666 @default.
• W4309944595 creator A5032725832 @default.
• W4309944595 creator A5058943734 @default.
• W4309944595 creator A5076896161 @default.
• W4309944595 date "2022-11-25" @default.
• W4309944595 modified "2023-10-14" @default.
• W4309944595 title "Rapid, noncontact, sensitive, and semiquantitative characterization of buffered hydrogen-fluoride-treated silicon wafer surfaces by terahertz emission spectroscopy" @default.
• W4309944595 cites W1963479691 @default.
• W4309944595 cites W1964861035 @default.
• W4309944595 cites W1967916204 @default.
• W4309944595 cites W1970065263 @default.
• W4309944595 cites W1972123810 @default.
• W4309944595 cites W1975930848 @default.
• W4309944595 cites W1978392299 @default.
• W4309944595 cites W1981104696 @default.
• W4309944595 cites W1985674465 @default.
• W4309944595 cites W1985981839 @default.
• W4309944595 cites W1996981126 @default.
• W4309944595 cites W1997393151 @default.
• W4309944595 cites W2006977454 @default.
• W4309944595 cites W2007416102 @default.
• W4309944595 cites W2008081802 @default.
• W4309944595 cites W2009476362 @default.
• W4309944595 cites W2012818399 @default.
• W4309944595 cites W2018385118 @default.
• W4309944595 cites W2019005156 @default.
• W4309944595 cites W2041537241 @default.
• W4309944595 cites W2044532374 @default.
• W4309944595 cites W2045913866 @default.
• W4309944595 cites W2048653238 @default.
• W4309944595 cites W2052331590 @default.
• W4309944595 cites W2074548443 @default.
• W4309944595 cites W2075343701 @default.
• W4309944595 cites W2080295870 @default.
• W4309944595 cites W2130210154 @default.
• W4309944595 cites W2160219699 @default.
• W4309944595 cites W2165910421 @default.
• W4309944595 cites W2282448595 @default.
• W4309944595 cites W2518956571 @default.
• W4309944595 cites W2605630303 @default.
• W4309944595 cites W2803648644 @default.
• W4309944595 cites W2895169344 @default.
• W4309944595 cites W2900407354 @default.
• W4309944595 cites W2912896198 @default.
• W4309944595 cites W2937798667 @default.
• W4309944595 cites W2942937647 @default.
• W4309944595 cites W2969890269 @default.
• W4309944595 cites W3089383014 @default.
• W4309944595 cites W3100386446 @default.
• W4309944595 cites W3192971975 @default.
• W4309944595 cites W3198079823 @default.
• W4309944595 cites W4200143718 @default.
• W4309944595 cites W4231433391 @default.
• W4309944595 cites W4231770518 @default.
• W4309944595 cites W4234614936 @default.
• W4309944595 cites W4280630514 @default.
• W4309944595 doi "https://doi.org/10.1038/s41377-022-01033-x" @default.
• W4309944595 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/36433935" @default.
• W4309944595 hasPublicationYear "2022" @default.
• W4309944595 type Work @default.
• W4309944595 citedByCount "4" @default.
• W4309944595 countsByYear W43099445952023 @default.
• W4309944595 crossrefType "journal-article" @default.
• W4309944595 hasAuthorship W4309944595A5023833666 @default.
• W4309944595 hasAuthorship W4309944595A5032725832 @default.
• W4309944595 hasAuthorship W4309944595A5058943734 @default.
• W4309944595 hasAuthorship W4309944595A5076896161 @default.
• W4309944595 hasBestOaLocation W43099445951 @default.
• W4309944595 hasConcept C107816215 @default.
• W4309944595 hasConcept C120665830 @default.
• W4309944595 hasConcept C121332964 @default.
• W4309944595 hasConcept C160671074 @default.
• W4309944595 hasConcept C167735695 @default.
• W4309944595 hasConcept C171250308 @default.
• W4309944595 hasConcept C192562407 @default.
• W4309944595 hasConcept C2779227376 @default.
• W4309944595 hasConcept C33574316 @default.
• W4309944595 hasConcept C49040817 @default.
• W4309944595 hasConcept C520434653 @default.
• W4309944595 hasConcept C544956773 @default.
• W4309944595 hasConcept C77887725 @default.
• W4309944595 hasConceptScore W4309944595C107816215 @default.
• W4309944595 hasConceptScore W4309944595C120665830 @default.
• W4309944595 hasConceptScore W4309944595C121332964 @default.
• W4309944595 hasConceptScore W4309944595C160671074 @default.
• W4309944595 hasConceptScore W4309944595C167735695 @default.
• W4309944595 hasConceptScore W4309944595C171250308 @default.
• W4309944595 hasConceptScore W4309944595C192562407 @default.
• W4309944595 hasConceptScore W4309944595C2779227376 @default.
• W4309944595 hasConceptScore W4309944595C33574316 @default.
• W4309944595 hasConceptScore W4309944595C49040817 @default.
• W4309944595 hasConceptScore W4309944595C520434653 @default.
• W4309944595 hasConceptScore W4309944595C544956773 @default.
• W4309944595 hasConceptScore W4309944595C77887725 @default.
• W4309944595 hasIssue "1" @default.
• W4309944595 hasLocation W43099445951 @default.
• W4309944595 hasLocation W43099445952 @default.
• W4309944595 hasLocation W43099445953 @default.

• next