Matches in SemOpenAlex for { <https://semopenalex.org/work/W4310059553> ?p ?o ?g. }
- W4310059553 endingPage "139608" @default.
- W4310059553 startingPage "139608" @default.
- W4310059553 abstract "We report here tailoring the properties of amorphous titanium oxide (a-TiOx) thin films by changing substrate heating as well as post-annealing. The a-TiOx thin films have been deposited on silicon substrates by direct current magnetron sputtering at a sputter power of 50 W without and with substrate heating (200°C) with no additional oxygen sources. After deposition, the films were annealed in vacuum for 1 hour at 300°C, 400°C, and 500°C. The influence of substrate heating and post-deposition annealing on the structure and surface morphology of the films along with their chemical states has been investigated. X-ray reflectivity analysis revealed that films deposited at 200°C were denser and thinner with low roughness than those deposited without substrate heating. Grazing incidence X-ray diffraction analyses showed that the films before and after annealing were amorphous; except for the ones deposited without substrate heating and were annealed at 500°C which showed slight crystallinity. From field emission scanning electron microscopy and atomic force microscopy images, distinct variations in the morphology of the films were also observed when films were deposited at 200°C X-ray photoelectron spectroscopy analysis showed that the a-TiOx films were oxygen deficient. It was observed that Ti was found in Ti4+ and Ti3+ states in the films and that the proportion of Ti4+ increased when the films were annealed at 500°C. Therefore, the structure, morphology, and chemical states of a-TiOx thin films can be tailored with substrate heating and post-annealing." @default.
- W4310059553 created "2022-11-30" @default.
- W4310059553 creator A5001972207 @default.
- W4310059553 creator A5023505540 @default.
- W4310059553 creator A5072053283 @default.
- W4310059553 creator A5075243976 @default.
- W4310059553 creator A5084667205 @default.
- W4310059553 creator A5084994054 @default.
- W4310059553 creator A5091321107 @default.
- W4310059553 date "2022-12-01" @default.
- W4310059553 modified "2023-09-25" @default.
- W4310059553 title "Investigation of thermally induced changes on structure, morphology and stoichiometry of sputter deposited titanium oxide thin films" @default.
- W4310059553 cites W1024090681 @default.
- W4310059553 cites W1952600543 @default.
- W4310059553 cites W1963970342 @default.
- W4310059553 cites W1965003065 @default.
- W4310059553 cites W1977933618 @default.
- W4310059553 cites W1981363396 @default.
- W4310059553 cites W1982087472 @default.
- W4310059553 cites W1987366926 @default.
- W4310059553 cites W1987436174 @default.
- W4310059553 cites W1989888844 @default.
- W4310059553 cites W1990352286 @default.
- W4310059553 cites W1993674640 @default.
- W4310059553 cites W2000523785 @default.
- W4310059553 cites W2005791502 @default.
- W4310059553 cites W2017593549 @default.
- W4310059553 cites W2020407811 @default.
- W4310059553 cites W2026581413 @default.
- W4310059553 cites W2027070818 @default.
- W4310059553 cites W2035651872 @default.
- W4310059553 cites W2041572637 @default.
- W4310059553 cites W2057058909 @default.
- W4310059553 cites W2059724291 @default.
- W4310059553 cites W2063279215 @default.
- W4310059553 cites W2068037839 @default.
- W4310059553 cites W2068216367 @default.
- W4310059553 cites W2074234436 @default.
- W4310059553 cites W2079291535 @default.
- W4310059553 cites W2080159692 @default.
- W4310059553 cites W2083201083 @default.
- W4310059553 cites W2114582089 @default.
- W4310059553 cites W2134016113 @default.
- W4310059553 cites W2169237555 @default.
- W4310059553 cites W2193619089 @default.
- W4310059553 cites W2281641683 @default.
- W4310059553 cites W2296657262 @default.
- W4310059553 cites W2299129177 @default.
- W4310059553 cites W2319034668 @default.
- W4310059553 cites W2328834005 @default.
- W4310059553 cites W2335636709 @default.
- W4310059553 cites W2479732722 @default.
- W4310059553 cites W2583820746 @default.
- W4310059553 cites W2590833728 @default.
- W4310059553 cites W2621003242 @default.
- W4310059553 cites W2741791008 @default.
- W4310059553 cites W2782724136 @default.
- W4310059553 cites W2787184320 @default.
- W4310059553 cites W2911210153 @default.
- W4310059553 cites W2921106579 @default.
- W4310059553 cites W2921939891 @default.
- W4310059553 cites W2955112185 @default.
- W4310059553 cites W2957281908 @default.
- W4310059553 cites W2975181991 @default.
- W4310059553 cites W2990082089 @default.
- W4310059553 cites W2994800586 @default.
- W4310059553 cites W3038249887 @default.
- W4310059553 cites W3129616481 @default.
- W4310059553 cites W3180057191 @default.
- W4310059553 cites W3202108062 @default.
- W4310059553 cites W2998799416 @default.
- W4310059553 doi "https://doi.org/10.1016/j.tsf.2022.139608" @default.
- W4310059553 hasPublicationYear "2022" @default.
- W4310059553 type Work @default.
- W4310059553 citedByCount "0" @default.
- W4310059553 crossrefType "journal-article" @default.
- W4310059553 hasAuthorship W4310059553A5001972207 @default.
- W4310059553 hasAuthorship W4310059553A5023505540 @default.
- W4310059553 hasAuthorship W4310059553A5072053283 @default.
- W4310059553 hasAuthorship W4310059553A5075243976 @default.
- W4310059553 hasAuthorship W4310059553A5084667205 @default.
- W4310059553 hasAuthorship W4310059553A5084994054 @default.
- W4310059553 hasAuthorship W4310059553A5091321107 @default.
- W4310059553 hasConcept C113196181 @default.
- W4310059553 hasConcept C127413603 @default.
- W4310059553 hasConcept C159985019 @default.
- W4310059553 hasConcept C171250308 @default.
- W4310059553 hasConcept C175708663 @default.
- W4310059553 hasConcept C185592680 @default.
- W4310059553 hasConcept C19067145 @default.
- W4310059553 hasConcept C191897082 @default.
- W4310059553 hasConcept C192562407 @default.
- W4310059553 hasConcept C22423302 @default.
- W4310059553 hasConcept C2777855556 @default.
- W4310059553 hasConcept C2779851234 @default.
- W4310059553 hasConcept C42360764 @default.
- W4310059553 hasConcept C43617362 @default.
- W4310059553 hasConcept C46275449 @default.