Matches in SemOpenAlex for { <https://semopenalex.org/work/W4310366823> ?p ?o ?g. }
- W4310366823 abstract "Nanoelectronics holds significant promise for two-dimensional (2D) semiconducting transition metal dichalcogenide (TMD) applications. On a polycrystalline WS2 monolayer created by metal-organic chemical vapor deposition (MOCVD) at 950 °C, we studied the nucleation, growth, and development of Al2O3 atomic layer deposition (ALD) on a SiO2/Si substrate. In this investigation, we used various complementary characterization methods, such as Raman spectroscopy, elastic recoil detection, atomic force microscopy, and time-of-flight secondary ion mass spectrometry, to understand thoroughly the intrinsic reactivity of WS2. Strong peak intensity changes at the interfaces in the Raman line scans of the SiO2/Si patterns suggest extremely crystalline WS2. After multiple ALD cycles, triangular WS2 crystals were decorated to provide a two-dimensional growth mode with a great selectivity for grain boundaries and step edges. The results of this work can be used for further exploration of the TMD monolayer structure and properties, which is essential for tailoring 2D materials for a specific application in devices." @default.
- W4310366823 created "2022-12-09" @default.
- W4310366823 creator A5001795469 @default.
- W4310366823 creator A5013545831 @default.
- W4310366823 creator A5019780175 @default.
- W4310366823 creator A5020571434 @default.
- W4310366823 creator A5042834217 @default.
- W4310366823 creator A5060019065 @default.
- W4310366823 creator A5072600497 @default.
- W4310366823 date "2022-11-29" @default.
- W4310366823 modified "2023-10-04" @default.
- W4310366823 title "Nucleation and growth mechanism for atomic layer deposition of Al2O3 on two-dimensional WS2 monolayer" @default.
- W4310366823 cites W1787911580 @default.
- W4310366823 cites W1868638423 @default.
- W4310366823 cites W1894357671 @default.
- W4310366823 cites W2008477506 @default.
- W4310366823 cites W2009569680 @default.
- W4310366823 cites W2018152850 @default.
- W4310366823 cites W2023520463 @default.
- W4310366823 cites W2043757353 @default.
- W4310366823 cites W2048610167 @default.
- W4310366823 cites W2058122340 @default.
- W4310366823 cites W2069497154 @default.
- W4310366823 cites W2072921326 @default.
- W4310366823 cites W2076838934 @default.
- W4310366823 cites W2087899039 @default.
- W4310366823 cites W2096727548 @default.
- W4310366823 cites W2112198498 @default.
- W4310366823 cites W2153263373 @default.
- W4310366823 cites W2158932701 @default.
- W4310366823 cites W2169933013 @default.
- W4310366823 cites W2556345892 @default.
- W4310366823 cites W2570166109 @default.
- W4310366823 cites W2586836119 @default.
- W4310366823 cites W2605620125 @default.
- W4310366823 cites W2610093233 @default.
- W4310366823 cites W2621173099 @default.
- W4310366823 cites W2728241900 @default.
- W4310366823 cites W2739151515 @default.
- W4310366823 cites W2779982165 @default.
- W4310366823 cites W2789806238 @default.
- W4310366823 cites W2890277353 @default.
- W4310366823 cites W2892072908 @default.
- W4310366823 cites W2899437421 @default.
- W4310366823 cites W2913144653 @default.
- W4310366823 cites W2915658572 @default.
- W4310366823 cites W2918310161 @default.
- W4310366823 cites W2950696371 @default.
- W4310366823 cites W2987375511 @default.
- W4310366823 cites W3041029313 @default.
- W4310366823 cites W3076449505 @default.
- W4310366823 cites W3080377968 @default.
- W4310366823 cites W3087429247 @default.
- W4310366823 cites W3098006072 @default.
- W4310366823 cites W4211172053 @default.
- W4310366823 cites W4246223399 @default.
- W4310366823 cites W4366807513 @default.
- W4310366823 doi "https://doi.org/10.1116/6.0001913" @default.
- W4310366823 hasPublicationYear "2022" @default.
- W4310366823 type Work @default.
- W4310366823 citedByCount "0" @default.
- W4310366823 crossrefType "journal-article" @default.
- W4310366823 hasAuthorship W4310366823A5001795469 @default.
- W4310366823 hasAuthorship W4310366823A5013545831 @default.
- W4310366823 hasAuthorship W4310366823A5019780175 @default.
- W4310366823 hasAuthorship W4310366823A5020571434 @default.
- W4310366823 hasAuthorship W4310366823A5042834217 @default.
- W4310366823 hasAuthorship W4310366823A5060019065 @default.
- W4310366823 hasAuthorship W4310366823A5072600497 @default.
- W4310366823 hasBestOaLocation W43103668231 @default.
- W4310366823 hasConcept C111368507 @default.
- W4310366823 hasConcept C120665830 @default.
- W4310366823 hasConcept C121332964 @default.
- W4310366823 hasConcept C127313418 @default.
- W4310366823 hasConcept C137637335 @default.
- W4310366823 hasConcept C141400236 @default.
- W4310366823 hasConcept C159467904 @default.
- W4310366823 hasConcept C171250308 @default.
- W4310366823 hasConcept C178790620 @default.
- W4310366823 hasConcept C185592680 @default.
- W4310366823 hasConcept C19067145 @default.
- W4310366823 hasConcept C191897082 @default.
- W4310366823 hasConcept C192562407 @default.
- W4310366823 hasConcept C2776523803 @default.
- W4310366823 hasConcept C2777289219 @default.
- W4310366823 hasConcept C2779227376 @default.
- W4310366823 hasConcept C40003534 @default.
- W4310366823 hasConcept C57410435 @default.
- W4310366823 hasConcept C61048295 @default.
- W4310366823 hasConcept C69544855 @default.
- W4310366823 hasConcept C7070889 @default.
- W4310366823 hasConceptScore W4310366823C111368507 @default.
- W4310366823 hasConceptScore W4310366823C120665830 @default.
- W4310366823 hasConceptScore W4310366823C121332964 @default.
- W4310366823 hasConceptScore W4310366823C127313418 @default.
- W4310366823 hasConceptScore W4310366823C137637335 @default.
- W4310366823 hasConceptScore W4310366823C141400236 @default.
- W4310366823 hasConceptScore W4310366823C159467904 @default.
- W4310366823 hasConceptScore W4310366823C171250308 @default.
- W4310366823 hasConceptScore W4310366823C178790620 @default.