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- W4310502057 abstract "This work reports an acoustic delay line (ADL) based on aluminum scandium nitride. In order to reduce the fabrication difficulty and AlScN defects at the bottom electrode edges, a floating bottom electrode is utilized in this acoustic delay line design. ADLs are fabricated with up to 200 µm flat delay gap by Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.7</inf> Sc <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.3</inf> N and AlN thin film. The increase of piezoelectric coefficient resulting from the 30% Sc doping enhances the electromechanical coupling by more than a factor of 2, compared to AlN. This design achieves an insertion loss of sub-6db without patterned bottom electrodes. With Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.7</inf> Sc <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.3</inf> N thin film, an insertion loss of 5.8 dB and a fractional bandwidth (FBW) of 6.0% are obtained at 650 MHz. Compared to the same design AlN device, insertion loss reduced by 27% and fractional bandwidth increased by 9%. This design gives an alternative to low-loss ADLs which does not require consideration of alignment between top and bottom layers." @default.
- W4310502057 created "2022-12-11" @default.
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- W4310502057 date "2022-10-10" @default.
- W4310502057 modified "2023-10-02" @default.
- W4310502057 title "Sub-6dB Aluminum Scandium Nitride Acoustic Delay Lines" @default.
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- W4310502057 doi "https://doi.org/10.1109/ius54386.2022.9958371" @default.
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