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• W4310553310 endingPage "107407" @default.
• W4310553310 startingPage "107407" @default.
• W4310553310 abstract "In this paper, an optical measurement system is proposed to measure the six-degree-of-freedom (6DOF) geometrical errors of a linear stage, and the errors are analyzed by the interferometric method and the geometrical optics method. Among them, the interferometric method is mainly used for the position error analysis. This method can solve the problem that geometrical optics is limited by the size of the sensor in our previous system, and improve the measurement accuracy of the position error. The geometrical optics method is used for the error analysis of the remaining 5DOF geometrical errors to simplify the data acquisition time and calculation amount. In addition, this paper also proposes a methodology to compensate for laser beam drifts and installation errors of optical components. We use two sensors to measure the 4DOF laser beam drifts and add them into the proposed mathematical model to solve these errors. We also use sensitivity analysis to analyze the influence of each installation error of optical components and find out the installation errors that need to be considered. Then we bring them into the mathematical model and solved them with least square methods. Finally, we verify the feasibility of the proposed measurement system through repeated experiments and comparisons with a commercial interferometer and an electronic level." @default.
• W4310553310 created "2022-12-12" @default.
• W4310553310 creator A5058883879 @default.
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• W4310553310 date "2023-03-01" @default.
• W4310553310 modified "2023-09-27" @default.
• W4310553310 title "Six-degree-of-freedom geometrical errors measurement system with compensation of laser beam drifts and installation errors for linear stage" @default.
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• W4310553310 doi "https://doi.org/10.1016/j.optlaseng.2022.107407" @default.
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