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- W4310584042 abstract "The micro/nano acoustic filters operating at 3 GHz – 7 GHz frequency range with large bandwidth and low loss are currently in demand. Such filters are usually designed as “ladder” circuits connecting resonators with large relative frequency distance between the anti-resonance and resonance and having a few orders impedance difference between them. Ideally, these resonators must be manufacturable with optical lithography, and the filters must tolerate an input power of a few watts. Essential progress been reached nowadays based on vibration modes in thin, submicron, crystalline platelet of strong piezoelectrics, such as lithium niobate (LN). Commercial availability of ion-sliced layers of different cuts of LN transferred on Si, SiC and other substrates opens wonderful possibilities for using materials with desired properties. Compared to SAW, in membranes it is easier to create a more uniform electric field better corresponding to stress distribution in an excited mode and thus providing higher piezo-electric coupling. Therefore, low order Lamb and plate modes, such as S0, SH0, S1, SH1 and A1 - providing the strongest piezo-coupling are of interest. In this paper I will review devices based on laterally excided Lamb mode A1 (so called XBARs) and shear plate resonances (SH1) excited by transversal electric field in periodic system of such resonators (YBARs). The use of suspended cavity membranes allows reaching excellent Q-factor and strong coupling. The device frequency is mainly determined by the membrane thickness and 3GHz–7 GHz can be reached, while maintaining electrode critical dimensions CD >0.5 µm. However, this technology is difficult. The devices are fragile, and their power handling can be limited because of low heat evacuation from the thin LN membrane. Therefore, we will also briefly discuss layered structures when such a membrane is mounted on a substrate - solving part of these problems at the cost of reduced coupling. This technology will inevitably dominate the area of micro-nano acoustic devices for frequencies higher than 3 GHz in the foreseeable future." @default.
- W4310584042 created "2022-12-12" @default.
- W4310584042 creator A5030341601 @default.
- W4310584042 date "2022-10-10" @default.
- W4310584042 modified "2023-10-02" @default.
- W4310584042 title "XBAR" @default.
- W4310584042 cites W2007476228 @default.
- W4310584042 cites W2013250065 @default.
- W4310584042 cites W2068128004 @default.
- W4310584042 cites W2498228800 @default.
- W4310584042 cites W2546511425 @default.
- W4310584042 cites W2592980364 @default.
- W4310584042 cites W2807499513 @default.
- W4310584042 cites W2810182497 @default.
- W4310584042 cites W2899625582 @default.
- W4310584042 cites W2913081886 @default.
- W4310584042 cites W2953835067 @default.
- W4310584042 cites W2971729607 @default.
- W4310584042 cites W2977463818 @default.
- W4310584042 cites W2995080095 @default.
- W4310584042 cites W3039703570 @default.
- W4310584042 cites W3094310600 @default.
- W4310584042 cites W3101925960 @default.
- W4310584042 cites W3106474261 @default.
- W4310584042 cites W3126974236 @default.
- W4310584042 cites W3185630287 @default.
- W4310584042 cites W3215260019 @default.
- W4310584042 cites W4214585961 @default.
- W4310584042 doi "https://doi.org/10.1109/ius54386.2022.9957805" @default.
- W4310584042 hasPublicationYear "2022" @default.
- W4310584042 type Work @default.
- W4310584042 citedByCount "0" @default.
- W4310584042 crossrefType "proceedings-article" @default.
- W4310584042 hasAuthorship W4310584042A5030341601 @default.
- W4310584042 hasConcept C100082104 @default.
- W4310584042 hasConcept C119599485 @default.
- W4310584042 hasConcept C121332964 @default.
- W4310584042 hasConcept C127413603 @default.
- W4310584042 hasConcept C131584629 @default.
- W4310584042 hasConcept C159985019 @default.
- W4310584042 hasConcept C187725362 @default.
- W4310584042 hasConcept C192562407 @default.
- W4310584042 hasConcept C24890656 @default.
- W4310584042 hasConcept C2776257435 @default.
- W4310584042 hasConcept C2777207636 @default.
- W4310584042 hasConcept C49040817 @default.
- W4310584042 hasConcept C60799052 @default.
- W4310584042 hasConcept C62520636 @default.
- W4310584042 hasConcept C76155785 @default.
- W4310584042 hasConcept C97126364 @default.
- W4310584042 hasConceptScore W4310584042C100082104 @default.
- W4310584042 hasConceptScore W4310584042C119599485 @default.
- W4310584042 hasConceptScore W4310584042C121332964 @default.
- W4310584042 hasConceptScore W4310584042C127413603 @default.
- W4310584042 hasConceptScore W4310584042C131584629 @default.
- W4310584042 hasConceptScore W4310584042C159985019 @default.
- W4310584042 hasConceptScore W4310584042C187725362 @default.
- W4310584042 hasConceptScore W4310584042C192562407 @default.
- W4310584042 hasConceptScore W4310584042C24890656 @default.
- W4310584042 hasConceptScore W4310584042C2776257435 @default.
- W4310584042 hasConceptScore W4310584042C2777207636 @default.
- W4310584042 hasConceptScore W4310584042C49040817 @default.
- W4310584042 hasConceptScore W4310584042C60799052 @default.
- W4310584042 hasConceptScore W4310584042C62520636 @default.
- W4310584042 hasConceptScore W4310584042C76155785 @default.
- W4310584042 hasConceptScore W4310584042C97126364 @default.
- W4310584042 hasLocation W43105840421 @default.
- W4310584042 hasOpenAccess W4310584042 @default.
- W4310584042 hasPrimaryLocation W43105840421 @default.
- W4310584042 hasRelatedWork W1998884399 @default.
- W4310584042 hasRelatedWork W2017214735 @default.
- W4310584042 hasRelatedWork W2101422099 @default.
- W4310584042 hasRelatedWork W2200415691 @default.
- W4310584042 hasRelatedWork W2366210022 @default.
- W4310584042 hasRelatedWork W2509507165 @default.
- W4310584042 hasRelatedWork W2511002895 @default.
- W4310584042 hasRelatedWork W2773645735 @default.
- W4310584042 hasRelatedWork W2802487339 @default.
- W4310584042 hasRelatedWork W3104982881 @default.
- W4310584042 isParatext "false" @default.
- W4310584042 isRetracted "false" @default.
- W4310584042 workType "article" @default.