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- W4310584174 abstract "In this paper, a bimorph piezoelectric MEMS microphone with a tractive structure is proposed. The structure presents an octagon with eight cantilever beams, all connected to a small octagon in the center of the device. The tractive structure adopts the electrical connection of a series-parallel combination without the problem of leading electrical signals to pads. The proposed piezoelectric MEMS microphone is simulated using Finite Element Method (FEM). Compared with fixed boundaries and unimorph structures, it generates higher stress and larger high-stress area during operation. The simulated resonant frequency and −3 dB roll-off frequency are 11.05 kHz and 20 Hz, respectively. Furthermore, the sensitivity at 1 kHz is −41.52 dB (Ref. 1V/Pa). The proposed microphone has great potential in miniaturized pickup applications with long standby and low power consumption." @default.
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- W4310584174 date "2022-10-10" @default.
- W4310584174 modified "2023-10-11" @default.
- W4310584174 title "Bimorph Piezoelectric MEMS Microphone with Tractive Structure" @default.
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- W4310584174 doi "https://doi.org/10.1109/ius54386.2022.9957653" @default.
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