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- W4310584546 abstract "ScAlN has high piezoelectricity and ferroelectricity. BAW filters with polarization inverted multilayer structure allow the further improvement of the power durability. In this study, by growing the Al-polar ScAIN film on the N-polar film, the polarization inverted two-layer ScAIN thin films resonator were fabricated. Unusual N-polar ScAIN film was obtained by a polarization inversion treatment to the as-grown usual Al-polar films. Polarity of the ScAlN films was determined by a press test. kt <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> of as-grown Al-polar ScAIN and N-polar ScAlN films after the polarization treatment (-190 V (2.0 MV/cm) at 300 °C) were estimated to be 7.7% and 5.6%, respectively. Because of an incomplete polarization inversion, kt <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> in the film after polarization inversion treatment slightly decreased compared with the as-grown films. Second overtone mode excitation was observed at GHz range, and fundamental mode was suppressed." @default.
- W4310584546 created "2022-12-12" @default.
- W4310584546 creator A5080943867 @default.
- W4310584546 creator A5089744443 @default.
- W4310584546 date "2022-10-10" @default.
- W4310584546 modified "2023-10-18" @default.
- W4310584546 title "Polarization inverted two layer ScAlN thin film resonator fabricated by applying external electric field" @default.
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- W4310584546 doi "https://doi.org/10.1109/ius54386.2022.9957918" @default.
- W4310584546 hasPublicationYear "2022" @default.
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