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- W4310584562 abstract "Thickness-shear mode piezoelectric thin films with high electromechanical coupling coefficient <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$k^{prime}{}_{35}^{2}$</tex> are attractive for quasi-shear mode FBAR and shear horizontal (SH)-type SAW devices. In 2007, our group reported <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$k^{prime}{}_{35}^{2}= 6.8%$</tex> for a polycrystalline ZnO film with a 23° tilt to the surface normal. Furthermore, in 2020, our group reported that Mg-substituted ZnO significantly improves thickness-extensional mode <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$k_{t}^{2}$</tex> . In this study, we report the fabrication of c-axis tilted MgZnO films. By using Mason's equivalent circuit model including both quasi-shear mode and thickness-extensional mode, quasi-shear mode electromechanical coupling coefficient <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$k^{prime}{}_{35}^{2}$</tex> and thickness-extensional mode electromechanical coupling coefficient <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$k^{prime}{}_{t}^{2}$</tex> were estimated to be 5.0% and 0.97%, respectively. The resonator excites not only fundamental mode but also 2 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>nd</sup> overtone mode because of an existence of a piezoelectrically inactive layer. Therefore, Mason's model including piezoelectrically inactive layer showed good agreement with the experimental data." @default.
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- W4310584562 date "2022-10-10" @default.
- W4310584562 modified "2023-10-16" @default.
- W4310584562 title "Quasi-Shear Mode Electromechanical Coupling Coefficient of c-Axis Tilted MgZnO Thin Films" @default.
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- W4310584562 doi "https://doi.org/10.1109/ius54386.2022.9957826" @default.
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