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- W4310584578 abstract "This paper presents a high-Q A0 mode plate wave resonator with dummy electrode arrays on a suspended X-cut LiNbO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> film. The designed resonators are simulated using the Finite Element Method, and the mode shapes of the A0 and transverse modes are analyzed. Compared to conventional resonators, more energy is concentrated in the central region, and lead resistance is reduced using dummy electrode arrays, resulting in a significant increase in the Q factor. The designed resonators are fabricated on a 4-inch X-cut LiNbO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> -on-insulator wafer with a 4-mask process flow. The measured Q factor at the series resonant frequency (about 1.2 GHz) increases from 460 of the conventional resonator to 998 using dummy electrode arrays. The proposed structure improves the Q factor without additional process and shows great potential in high-performance Lamb wave resonators and filters." @default.
- W4310584578 created "2022-12-12" @default.
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- W4310584578 date "2022-10-10" @default.
- W4310584578 modified "2023-10-18" @default.
- W4310584578 title "High-Q A0 Mode Plate Wave Resonator on X-cut LiNbO<sub>3</sub> Films with Dummy Electrode Arrays" @default.
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- W4310584578 doi "https://doi.org/10.1109/ius54386.2022.9957311" @default.
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