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• W4310584996 abstract "Lithium niobate on insulator (LNOI) platform attracts much attention in recent years for its potential to fabricate wideband surface acoustic wave (SAW) filters using the shear horizontal (SH) mode. However, the coexistence of Rayleigh mode can deteriorate the performance of SH-based filters, and thus implementing a systematical investigation of the influences of the substrates and the LN cut angles on the Rayleigh elimination window (REW) is necessary to evaluate the advantageous designing parameters for a target spurious-free filter. In this work, the REW of rotated YX-LN/SiO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> /substrate (including SiC, Si, Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> O <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> , diamond and quartz) platform is studied through finite element method (FEM), and it is found that the LN/SiO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> /SiC shows a wider REW since the Rayleigh mode can be totally eliminated in a window range (hC <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>u</inf> /λ) of Cu electrode normalized thickness of 0.08 when θ is between 18° and 24°. Resonators and filters with different hC <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>u</inf> /λ were fabricated on 15°, 20° and 25°YX-LN/SiO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> /SiC and verified the simulation results, and among which the filters built on 20° and 25°YX-LN/SiO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> /SiC are spurious-free and exhibit 3-dB fractional bandwidth (FBW) of about 20% and minimum insertion loss (IL <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>min</inf> ) of about 1.2 dB, respectively." @default.
• W4310584996 created "2022-12-12" @default.
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• W4310584996 date "2022-10-10" @default.
• W4310584996 modified "2023-09-30" @default.
• W4310584996 title "Enlarging Rayleigh Elimination Window through Modulating Substrate and LiNbO₃ Cut Angle for Fabricating LNOI-Based Spurious-Free Wideband SAW Filters" @default.
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• W4310584996 doi "https://doi.org/10.1109/ius54386.2022.9957406" @default.
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