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- W4310585501 abstract "We have designed and fabricated Y+36°-cut LiNbO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> Film Bulk Acoustic Resonators (FBAR) compatible with the n79 band. Leveraging longitudinal waves and an energy trapping condition, a single-mode resonance is obtained at 4.7 GHz, with an effective electromechanical coupling coefficient (kt <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> ) of 25 % and quality factor at antiresonance (Q <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>a</inf> ) of 574. This leads to Qxf and Q× kt <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> products of 2.7×10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>12</sup> Hz and 139, respectively. A Temperature Coefficient of Frequency (TCF) of −75 and −70 ppm/°C respectively at resonance and antiresonance are obtained. These figure-of-merits are the highest reported up to date for LiNbO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> FBARs, highlighting the potentialities of LiNbO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> single crystal film as an alternative to AIN-based BAW devices for next generation of RF filters. To demonstrate this, a tentative filter design based on the measured resonator characteristics is proposed." @default.
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- W4310585501 date "2022-10-10" @default.
- W4310585501 modified "2023-10-11" @default.
- W4310585501 title "LiNbO<sub>3</sub> Film Bulk Acoustic Resonator for n79 band" @default.
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- W4310585501 doi "https://doi.org/10.1109/ius54386.2022.9957601" @default.
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