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- W4310585695 abstract "The etching of silicon-based slanted grating based on CHF <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> /O <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> /Ar reactive ion beam (RIBE) etching is investigated. Impacts of the CHF <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> /O <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> /Ar gases flow rate on the roughness, tilt angle and etching rate are studied in detail. It is found that when the Cr is adopted as the metal mask, the etching rate, sidewall roughness, and inclination angle of the mesa are changed significantly with the flow rate variation of the CHF <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> /O <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> gases. When the etching gases of the CHF <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> /O <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> /Ar =5/3/2, a controllable grating etching rate of 32.8 nm/min, an inclination of 120°, and a smooth mesa side-wall are finally obtained, which can improve the sidewall inclination and ensuring the smoothness of the grating sidewall. The stable grating etching processes delivered in this work are of benefit to preparing the grating, which has a very important influence on the development of AR/VR." @default.
- W4310585695 created "2022-12-12" @default.
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- W4310585695 date "2022-10-25" @default.
- W4310585695 modified "2023-10-17" @default.
- W4310585695 title "Fabrication of Slanted Grating Utilizing Reaction Ion Beam Etching: The Role of CHF<sub>3</sub> and O<sub>2</sub> Etching Atmosphere" @default.
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- W4310585695 doi "https://doi.org/10.1109/icsict55466.2022.9963283" @default.
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