Matches in SemOpenAlex for { <https://semopenalex.org/work/W4310880210> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W4310880210 abstract "In this paper, a heat conduction structure (HCS) is designed to conduct the concentrated heat on the etched wafer in the etching process of MEMS devices with support anchors. During the reactive ion etching process, the anchor layer is the main heat conduction path in vacuum. The length of heat conduction path in different locations varies with the distance from anchors. Therefore, the uneven contribution of the anchors leads to the local heat concentration, which worsens the etching homogeneity and causes the over-etching. The HCS also consumes reactive ion and then reduces etching defect of the sidewalls. FE simulations and experiments have verified the effectiveness of the structure. The average over- etching value decreases from O.87μm to O.20μm and the profile defect of sidewalls is significantly improved as observed by Scanning Electron Microscope." @default.
- W4310880210 created "2022-12-20" @default.
- W4310880210 creator A5016259130 @default.
- W4310880210 creator A5033497327 @default.
- W4310880210 creator A5036651728 @default.
- W4310880210 creator A5051120464 @default.
- W4310880210 creator A5075311656 @default.
- W4310880210 creator A5083967189 @default.
- W4310880210 date "2022-10-30" @default.
- W4310880210 modified "2023-09-25" @default.
- W4310880210 title "A Heat Conduction Structure for the Etching Process of MEMS Devices with Support Anchors" @default.
- W4310880210 cites W2027872603 @default.
- W4310880210 cites W2049751832 @default.
- W4310880210 cites W2308336328 @default.
- W4310880210 cites W2802749458 @default.
- W4310880210 doi "https://doi.org/10.1109/sensors52175.2022.9967127" @default.
- W4310880210 hasPublicationYear "2022" @default.
- W4310880210 type Work @default.
- W4310880210 citedByCount "0" @default.
- W4310880210 crossrefType "proceedings-article" @default.
- W4310880210 hasAuthorship W4310880210A5016259130 @default.
- W4310880210 hasAuthorship W4310880210A5033497327 @default.
- W4310880210 hasAuthorship W4310880210A5036651728 @default.
- W4310880210 hasAuthorship W4310880210A5051120464 @default.
- W4310880210 hasAuthorship W4310880210A5075311656 @default.
- W4310880210 hasAuthorship W4310880210A5083967189 @default.
- W4310880210 hasConcept C100460472 @default.
- W4310880210 hasConcept C119857082 @default.
- W4310880210 hasConcept C1291036 @default.
- W4310880210 hasConcept C130472188 @default.
- W4310880210 hasConcept C142259097 @default.
- W4310880210 hasConcept C159985019 @default.
- W4310880210 hasConcept C160671074 @default.
- W4310880210 hasConcept C172100665 @default.
- W4310880210 hasConcept C192562407 @default.
- W4310880210 hasConcept C26771246 @default.
- W4310880210 hasConcept C2779227376 @default.
- W4310880210 hasConcept C2992503781 @default.
- W4310880210 hasConcept C33220542 @default.
- W4310880210 hasConcept C37977207 @default.
- W4310880210 hasConcept C41008148 @default.
- W4310880210 hasConcept C49040817 @default.
- W4310880210 hasConceptScore W4310880210C100460472 @default.
- W4310880210 hasConceptScore W4310880210C119857082 @default.
- W4310880210 hasConceptScore W4310880210C1291036 @default.
- W4310880210 hasConceptScore W4310880210C130472188 @default.
- W4310880210 hasConceptScore W4310880210C142259097 @default.
- W4310880210 hasConceptScore W4310880210C159985019 @default.
- W4310880210 hasConceptScore W4310880210C160671074 @default.
- W4310880210 hasConceptScore W4310880210C172100665 @default.
- W4310880210 hasConceptScore W4310880210C192562407 @default.
- W4310880210 hasConceptScore W4310880210C26771246 @default.
- W4310880210 hasConceptScore W4310880210C2779227376 @default.
- W4310880210 hasConceptScore W4310880210C2992503781 @default.
- W4310880210 hasConceptScore W4310880210C33220542 @default.
- W4310880210 hasConceptScore W4310880210C37977207 @default.
- W4310880210 hasConceptScore W4310880210C41008148 @default.
- W4310880210 hasConceptScore W4310880210C49040817 @default.
- W4310880210 hasLocation W43108802101 @default.
- W4310880210 hasOpenAccess W4310880210 @default.
- W4310880210 hasPrimaryLocation W43108802101 @default.
- W4310880210 hasRelatedWork W1598917330 @default.
- W4310880210 hasRelatedWork W1839133467 @default.
- W4310880210 hasRelatedWork W1955183922 @default.
- W4310880210 hasRelatedWork W1968937887 @default.
- W4310880210 hasRelatedWork W2027983671 @default.
- W4310880210 hasRelatedWork W2082133582 @default.
- W4310880210 hasRelatedWork W2171833865 @default.
- W4310880210 hasRelatedWork W2354298856 @default.
- W4310880210 hasRelatedWork W2399418765 @default.
- W4310880210 hasRelatedWork W2021224535 @default.
- W4310880210 isParatext "false" @default.
- W4310880210 isRetracted "false" @default.
- W4310880210 workType "article" @default.