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• W4311105721 endingPage "1184" @default.
• W4311105721 startingPage "1174" @default.
• W4311105721 abstract "To improve plasma and chemical resistance on various vacuum components used for semiconductor manufacturing equipment, various ceramic coating techniques have been applied. Among these methods for ceramic coating, the well-known atmospheric plasma spray (APS) is advantageous for providing thick film (100 µm or more) deposition. However, there are problems associated with the phase transition of the coating film and poor film quality due to formation of voids. To solve these problems, the aerosol deposition (AD) method has been developed. This method provides nice ceramic film quality. However, the coating rate is quite slow and has difficulty producing thick films (>30 µm). To overcome these limitations, microwave plasma-assisted aerosol deposition (μ-PAD) is applied at low vacuum conditions without the AD nozzle. This method uses a microwave plasma source during the AD process. After enduring a long-term durability test, as a trial run, μ-PAD has been applied on the actual process site. With the Al2O3 powder, μ-PAD shows a coating rate that is 12 times higher than the AD method. In addition, the formation of a thicker film (96 µm) deposition has been demonstrated. On the other hand, the coating film hardness, porosity, adhesion, and withstand voltage characteristics were confirmed to be less than the AD method." @default.
• W4311105721 created "2022-12-23" @default.
• W4311105721 creator A5005737720 @default.
• W4311105721 creator A5027313828 @default.
• W4311105721 creator A5039985716 @default.
• W4311105721 creator A5041547417 @default.
• W4311105721 creator A5068716949 @default.
• W4311105721 creator A5072645451 @default.
• W4311105721 creator A5073481919 @default.
• W4311105721 creator A5074361220 @default.
• W4311105721 creator A5079887109 @default.
• W4311105721 date "2022-12-02" @default.
• W4311105721 modified "2023-10-03" @default.
• W4311105721 title "Microwave Plasma Assisted Aerosol Deposition (μ-PAD) for Ceramic Coating Applications" @default.
• W4311105721 cites W1970652171 @default.
• W4311105721 cites W1978758859 @default.
• W4311105721 cites W1994352566 @default.
• W4311105721 cites W2007594820 @default.
• W4311105721 cites W2019794374 @default.
• W4311105721 cites W2070710758 @default.
• W4311105721 cites W2087785949 @default.
• W4311105721 cites W2105391272 @default.
• W4311105721 cites W2133693435 @default.
• W4311105721 cites W2143802240 @default.
• W4311105721 cites W2145920364 @default.
• W4311105721 cites W2789517172 @default.
• W4311105721 cites W2888835041 @default.
• W4311105721 cites W2899320920 @default.
• W4311105721 cites W2920949820 @default.
• W4311105721 cites W2945987793 @default.
• W4311105721 cites W2946179687 @default.
• W4311105721 cites W2988399871 @default.
• W4311105721 cites W3022299620 @default.
• W4311105721 cites W3088738559 @default.
• W4311105721 cites W3174698142 @default.
• W4311105721 cites W4285010435 @default.
• W4311105721 cites W4292263887 @default.
• W4311105721 doi "https://doi.org/10.3390/ceramics5040083" @default.
• W4311105721 hasPublicationYear "2022" @default.
• W4311105721 type Work @default.
• W4311105721 citedByCount "0" @default.
• W4311105721 crossrefType "journal-article" @default.
• W4311105721 hasAuthorship W4311105721A5005737720 @default.
• W4311105721 hasAuthorship W4311105721A5027313828 @default.
• W4311105721 hasAuthorship W4311105721A5039985716 @default.
• W4311105721 hasAuthorship W4311105721A5041547417 @default.
• W4311105721 hasAuthorship W4311105721A5068716949 @default.
• W4311105721 hasAuthorship W4311105721A5072645451 @default.
• W4311105721 hasAuthorship W4311105721A5073481919 @default.
• W4311105721 hasAuthorship W4311105721A5074361220 @default.
• W4311105721 hasAuthorship W4311105721A5079887109 @default.
• W4311105721 hasBestOaLocation W43111057211 @default.
• W4311105721 hasConcept C121332964 @default.
• W4311105721 hasConcept C127413603 @default.
• W4311105721 hasConcept C134132462 @default.
• W4311105721 hasConcept C151730666 @default.
• W4311105721 hasConcept C159985019 @default.
• W4311105721 hasConcept C191897082 @default.
• W4311105721 hasConcept C192562407 @default.
• W4311105721 hasConcept C2779227376 @default.
• W4311105721 hasConcept C2781448156 @default.
• W4311105721 hasConcept C2816523 @default.
• W4311105721 hasConcept C41008148 @default.
• W4311105721 hasConcept C44838205 @default.
• W4311105721 hasConcept C56200935 @default.
• W4311105721 hasConcept C62520636 @default.
• W4311105721 hasConcept C64297162 @default.
• W4311105721 hasConcept C6648577 @default.
• W4311105721 hasConcept C76155785 @default.
• W4311105721 hasConcept C78519656 @default.
• W4311105721 hasConcept C82706917 @default.
• W4311105721 hasConcept C86803240 @default.
• W4311105721 hasConceptScore W4311105721C121332964 @default.
• W4311105721 hasConceptScore W4311105721C127413603 @default.
• W4311105721 hasConceptScore W4311105721C134132462 @default.
• W4311105721 hasConceptScore W4311105721C151730666 @default.
• W4311105721 hasConceptScore W4311105721C159985019 @default.
• W4311105721 hasConceptScore W4311105721C191897082 @default.
• W4311105721 hasConceptScore W4311105721C192562407 @default.
• W4311105721 hasConceptScore W4311105721C2779227376 @default.
• W4311105721 hasConceptScore W4311105721C2781448156 @default.
• W4311105721 hasConceptScore W4311105721C2816523 @default.
• W4311105721 hasConceptScore W4311105721C41008148 @default.
• W4311105721 hasConceptScore W4311105721C44838205 @default.
• W4311105721 hasConceptScore W4311105721C56200935 @default.
• W4311105721 hasConceptScore W4311105721C62520636 @default.
• W4311105721 hasConceptScore W4311105721C64297162 @default.
• W4311105721 hasConceptScore W4311105721C6648577 @default.
• W4311105721 hasConceptScore W4311105721C76155785 @default.
• W4311105721 hasConceptScore W4311105721C78519656 @default.
• W4311105721 hasConceptScore W4311105721C82706917 @default.
• W4311105721 hasConceptScore W4311105721C86803240 @default.
• W4311105721 hasFunder F4320321681 @default.
• W4311105721 hasFunder F4320322116 @default.
• W4311105721 hasIssue "4" @default.
• W4311105721 hasLocation W43111057211 @default.
• W4311105721 hasOpenAccess W4311105721 @default.
• W4311105721 hasPrimaryLocation W43111057211 @default.

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