Matches in SemOpenAlex for { <https://semopenalex.org/work/W4311117584> ?p ?o ?g. }
- W4311117584 abstract "A new technique is assessed in order to measure, at the wafer scale, direct bonding energies. It is derived from the standard Double Cantilever Beam (DCB) method and uses interferometry in confocal IR laser source microscopy to measure crack openings. Such a bonding energy measurement protocol has better accuracy compared to other techniques. This is due to a better confocal microscopy resolution and the high intensity of the laser source. The elastic energy stored in bent wafers is obtained by measuring the beam curvature. DCB deformation models are discussed from the short-range crack opening theory to long distance beam-bending theories. Comparison is made between models, experimental results, and FEM simulations. Finally, the bonding energy error during standard measurements is estimated." @default.
- W4311117584 created "2022-12-23" @default.
- W4311117584 creator A5003237967 @default.
- W4311117584 creator A5005062731 @default.
- W4311117584 creator A5011855887 @default.
- W4311117584 creator A5021816461 @default.
- W4311117584 creator A5034531232 @default.
- W4311117584 creator A5039939366 @default.
- W4311117584 creator A5054305416 @default.
- W4311117584 date "2022-12-02" @default.
- W4311117584 modified "2023-10-14" @default.
- W4311117584 title "Double cantilever beam bonding energy measurement using confocal IR microscopy" @default.
- W4311117584 cites W106342781 @default.
- W4311117584 cites W1552193818 @default.
- W4311117584 cites W1964958541 @default.
- W4311117584 cites W1970799689 @default.
- W4311117584 cites W1973671776 @default.
- W4311117584 cites W1985824983 @default.
- W4311117584 cites W1987576086 @default.
- W4311117584 cites W1997697699 @default.
- W4311117584 cites W2010784362 @default.
- W4311117584 cites W2014615801 @default.
- W4311117584 cites W2021407985 @default.
- W4311117584 cites W2026317222 @default.
- W4311117584 cites W2027454095 @default.
- W4311117584 cites W2036284768 @default.
- W4311117584 cites W2038667420 @default.
- W4311117584 cites W2038839003 @default.
- W4311117584 cites W2048754074 @default.
- W4311117584 cites W2060862073 @default.
- W4311117584 cites W2076545802 @default.
- W4311117584 cites W2084464066 @default.
- W4311117584 cites W2089762178 @default.
- W4311117584 cites W2098984885 @default.
- W4311117584 cites W2461809579 @default.
- W4311117584 cites W3103145119 @default.
- W4311117584 cites W4248907494 @default.
- W4311117584 doi "https://doi.org/10.1063/5.0114668" @default.
- W4311117584 hasPublicationYear "2022" @default.
- W4311117584 type Work @default.
- W4311117584 citedByCount "0" @default.
- W4311117584 crossrefType "journal-article" @default.
- W4311117584 hasAuthorship W4311117584A5003237967 @default.
- W4311117584 hasAuthorship W4311117584A5005062731 @default.
- W4311117584 hasAuthorship W4311117584A5011855887 @default.
- W4311117584 hasAuthorship W4311117584A5021816461 @default.
- W4311117584 hasAuthorship W4311117584A5034531232 @default.
- W4311117584 hasAuthorship W4311117584A5039939366 @default.
- W4311117584 hasAuthorship W4311117584A5054305416 @default.
- W4311117584 hasConcept C120665830 @default.
- W4311117584 hasConcept C121332964 @default.
- W4311117584 hasConcept C141354745 @default.
- W4311117584 hasConcept C147080431 @default.
- W4311117584 hasConcept C159985019 @default.
- W4311117584 hasConcept C160671074 @default.
- W4311117584 hasConcept C168834538 @default.
- W4311117584 hasConcept C192562407 @default.
- W4311117584 hasConcept C195065555 @default.
- W4311117584 hasConcept C2524010 @default.
- W4311117584 hasConcept C26771246 @default.
- W4311117584 hasConcept C33923547 @default.
- W4311117584 hasConcept C49040817 @default.
- W4311117584 hasConcept C520434653 @default.
- W4311117584 hasConcept C67649825 @default.
- W4311117584 hasConcept C77017923 @default.
- W4311117584 hasConcept C87210426 @default.
- W4311117584 hasConceptScore W4311117584C120665830 @default.
- W4311117584 hasConceptScore W4311117584C121332964 @default.
- W4311117584 hasConceptScore W4311117584C141354745 @default.
- W4311117584 hasConceptScore W4311117584C147080431 @default.
- W4311117584 hasConceptScore W4311117584C159985019 @default.
- W4311117584 hasConceptScore W4311117584C160671074 @default.
- W4311117584 hasConceptScore W4311117584C168834538 @default.
- W4311117584 hasConceptScore W4311117584C192562407 @default.
- W4311117584 hasConceptScore W4311117584C195065555 @default.
- W4311117584 hasConceptScore W4311117584C2524010 @default.
- W4311117584 hasConceptScore W4311117584C26771246 @default.
- W4311117584 hasConceptScore W4311117584C33923547 @default.
- W4311117584 hasConceptScore W4311117584C49040817 @default.
- W4311117584 hasConceptScore W4311117584C520434653 @default.
- W4311117584 hasConceptScore W4311117584C67649825 @default.
- W4311117584 hasConceptScore W4311117584C77017923 @default.
- W4311117584 hasConceptScore W4311117584C87210426 @default.
- W4311117584 hasFunder F4320323911 @default.
- W4311117584 hasIssue "21" @default.
- W4311117584 hasLocation W43111175841 @default.
- W4311117584 hasOpenAccess W4311117584 @default.
- W4311117584 hasPrimaryLocation W43111175841 @default.
- W4311117584 hasRelatedWork W119975033 @default.
- W4311117584 hasRelatedWork W1965710566 @default.
- W4311117584 hasRelatedWork W2039619733 @default.
- W4311117584 hasRelatedWork W2063217361 @default.
- W4311117584 hasRelatedWork W2067554155 @default.
- W4311117584 hasRelatedWork W2069744136 @default.
- W4311117584 hasRelatedWork W2094066981 @default.
- W4311117584 hasRelatedWork W2403466521 @default.
- W4311117584 hasRelatedWork W2914471922 @default.
- W4311117584 hasRelatedWork W4311274670 @default.
- W4311117584 hasVolume "132" @default.
- W4311117584 isParatext "false" @default.