FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4311191307> ?p ?o ?g. }

• W4311191307 endingPage "123702" @default.
• W4311191307 startingPage "123702" @default.
• W4311191307 abstract "Commonly used melamine formaldehyde micro-particles exposed to an rf discharge are known to be etched by a plasma as soon as an admixture of oxygen is present. By means of in situ high precision size measurements, the plasma–surface interaction is investigated. A comparison of experimental data, advanced Mie-scattering techniques, and a reaction rate model allows, for the first time, to quantitatively describe the etch process." @default.
• W4311191307 created "2022-12-24" @default.
• W4311191307 creator A5001417193 @default.
• W4311191307 creator A5016601059 @default.
• W4311191307 creator A5033115425 @default.
• W4311191307 date "2022-12-01" @default.
• W4311191307 modified "2023-09-28" @default.
• W4311191307 title "Non-linear etch process of MF particles embedded in an rf plasma with oxygen admixture" @default.
• W4311191307 cites W1672766972 @default.
• W4311191307 cites W177875731 @default.
• W4311191307 cites W1964844665 @default.
• W4311191307 cites W1971998754 @default.
• W4311191307 cites W1996895130 @default.
• W4311191307 cites W2001695597 @default.
• W4311191307 cites W2004569451 @default.
• W4311191307 cites W2008203865 @default.
• W4311191307 cites W2016206057 @default.
• W4311191307 cites W2050082008 @default.
• W4311191307 cites W2050870661 @default.
• W4311191307 cites W2070225393 @default.
• W4311191307 cites W2081570789 @default.
• W4311191307 cites W2170546836 @default.
• W4311191307 cites W2394847084 @default.
• W4311191307 cites W2598424333 @default.
• W4311191307 cites W2622476030 @default.
• W4311191307 cites W2754505673 @default.
• W4311191307 cites W2799457086 @default.
• W4311191307 cites W2807799166 @default.
• W4311191307 cites W2884043769 @default.
• W4311191307 cites W2906487293 @default.
• W4311191307 cites W2916973750 @default.
• W4311191307 cites W2943351367 @default.
• W4311191307 cites W2950110236 @default.
• W4311191307 cites W2991121752 @default.
• W4311191307 cites W3023391520 @default.
• W4311191307 cites W3041471636 @default.
• W4311191307 cites W3157587156 @default.
• W4311191307 cites W3190598554 @default.
• W4311191307 cites W3191994040 @default.
• W4311191307 cites W3194630984 @default.
• W4311191307 cites W4200440230 @default.
• W4311191307 doi "https://doi.org/10.1063/5.0129509" @default.
• W4311191307 hasPublicationYear "2022" @default.
• W4311191307 type Work @default.
• W4311191307 citedByCount "1" @default.
• W4311191307 countsByYear W43111913072023 @default.
• W4311191307 crossrefType "journal-article" @default.
• W4311191307 hasAuthorship W4311191307A5001417193 @default.
• W4311191307 hasAuthorship W4311191307A5016601059 @default.
• W4311191307 hasAuthorship W4311191307A5033115425 @default.
• W4311191307 hasConcept C100460472 @default.
• W4311191307 hasConcept C107187091 @default.
• W4311191307 hasConcept C120456961 @default.
• W4311191307 hasConcept C120665830 @default.
• W4311191307 hasConcept C121332964 @default.
• W4311191307 hasConcept C159985019 @default.
• W4311191307 hasConcept C171250308 @default.
• W4311191307 hasConcept C184779094 @default.
• W4311191307 hasConcept C185544564 @default.
• W4311191307 hasConcept C191486275 @default.
• W4311191307 hasConcept C192562407 @default.
• W4311191307 hasConcept C2775979504 @default.
• W4311191307 hasConcept C2779227376 @default.
• W4311191307 hasConcept C540031477 @default.
• W4311191307 hasConcept C60581705 @default.
• W4311191307 hasConcept C62520636 @default.
• W4311191307 hasConcept C63688654 @default.
• W4311191307 hasConcept C82706917 @default.
• W4311191307 hasConceptScore W4311191307C100460472 @default.
• W4311191307 hasConceptScore W4311191307C107187091 @default.
• W4311191307 hasConceptScore W4311191307C120456961 @default.
• W4311191307 hasConceptScore W4311191307C120665830 @default.
• W4311191307 hasConceptScore W4311191307C121332964 @default.
• W4311191307 hasConceptScore W4311191307C159985019 @default.
• W4311191307 hasConceptScore W4311191307C171250308 @default.
• W4311191307 hasConceptScore W4311191307C184779094 @default.
• W4311191307 hasConceptScore W4311191307C185544564 @default.
• W4311191307 hasConceptScore W4311191307C191486275 @default.
• W4311191307 hasConceptScore W4311191307C192562407 @default.
• W4311191307 hasConceptScore W4311191307C2775979504 @default.
• W4311191307 hasConceptScore W4311191307C2779227376 @default.
• W4311191307 hasConceptScore W4311191307C540031477 @default.
• W4311191307 hasConceptScore W4311191307C60581705 @default.
• W4311191307 hasConceptScore W4311191307C62520636 @default.
• W4311191307 hasConceptScore W4311191307C63688654 @default.
• W4311191307 hasConceptScore W4311191307C82706917 @default.
• W4311191307 hasFunder F4320320879 @default.
• W4311191307 hasIssue "12" @default.
• W4311191307 hasLocation W43111913071 @default.
• W4311191307 hasOpenAccess W4311191307 @default.
• W4311191307 hasPrimaryLocation W43111913071 @default.
• W4311191307 hasRelatedWork W1976487763 @default.
• W4311191307 hasRelatedWork W1992922915 @default.
• W4311191307 hasRelatedWork W2035218621 @default.
• W4311191307 hasRelatedWork W2049342529 @default.
• W4311191307 hasRelatedWork W2056938791 @default.
• W4311191307 hasRelatedWork W2071288135 @default.
• W4311191307 hasRelatedWork W2075857585 @default.

• next