Matches in SemOpenAlex for { <https://semopenalex.org/work/W4311413061> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W4311413061 abstract "In this paper, a shock detector is introduced using a micro-scale triboelectric generator and an electrostatic MEMS switch. The fabrication of a micro-scale tribo-electric-nano generator is carried out using MEMS technology for the first time. The fabrication technique enabled reducing the size by 85% compared to a prior work. The generator has aluminum-polyimide on the bottom layer, a gap, and a top layer of Al and amorphous silicon (a-Si), The generator produces 0.4 <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$V$</tex> pulses as a response to impulse excitation, the produced voltage is used to trigger switch closure by adding it to a DC voltage that is enough to bend the beam down but not enough to close it. The combination of MEMS-triboelectric generator and MEMS electrostatic actuators is ideal because both are fabricated with CMOS technology and can be integrated on the same chip. The proposed system enables creating event-powered micro-switches." @default.
- W4311413061 created "2022-12-26" @default.
- W4311413061 creator A5013721686 @default.
- W4311413061 creator A5016931553 @default.
- W4311413061 creator A5020749822 @default.
- W4311413061 creator A5060666301 @default.
- W4311413061 date "2022-10-30" @default.
- W4311413061 modified "2023-10-01" @default.
- W4311413061 title "Toward CMOS-Compatible Triboelectric Generator to Operate MEMS" @default.
- W4311413061 cites W2097753772 @default.
- W4311413061 cites W2204053103 @default.
- W4311413061 cites W2619763057 @default.
- W4311413061 cites W2730020177 @default.
- W4311413061 cites W2773279057 @default.
- W4311413061 cites W2904575651 @default.
- W4311413061 cites W2911405284 @default.
- W4311413061 cites W2912503372 @default.
- W4311413061 cites W2944156674 @default.
- W4311413061 cites W2946096447 @default.
- W4311413061 cites W2999785359 @default.
- W4311413061 cites W3004364717 @default.
- W4311413061 cites W3014568732 @default.
- W4311413061 cites W3034028767 @default.
- W4311413061 cites W3042416287 @default.
- W4311413061 cites W3087435318 @default.
- W4311413061 cites W3088690260 @default.
- W4311413061 cites W3094292270 @default.
- W4311413061 cites W3095467809 @default.
- W4311413061 cites W3114160983 @default.
- W4311413061 cites W3156336453 @default.
- W4311413061 cites W3156542082 @default.
- W4311413061 cites W3162775523 @default.
- W4311413061 cites W3182500961 @default.
- W4311413061 cites W3197747747 @default.
- W4311413061 doi "https://doi.org/10.1109/sensors52175.2022.9967076" @default.
- W4311413061 hasPublicationYear "2022" @default.
- W4311413061 type Work @default.
- W4311413061 citedByCount "0" @default.
- W4311413061 crossrefType "proceedings-article" @default.
- W4311413061 hasAuthorship W4311413061A5013721686 @default.
- W4311413061 hasAuthorship W4311413061A5016931553 @default.
- W4311413061 hasAuthorship W4311413061A5020749822 @default.
- W4311413061 hasAuthorship W4311413061A5060666301 @default.
- W4311413061 hasConcept C119599485 @default.
- W4311413061 hasConcept C121332964 @default.
- W4311413061 hasConcept C127413603 @default.
- W4311413061 hasConcept C159985019 @default.
- W4311413061 hasConcept C163258240 @default.
- W4311413061 hasConcept C192562407 @default.
- W4311413061 hasConcept C2780992000 @default.
- W4311413061 hasConcept C37977207 @default.
- W4311413061 hasConcept C41008148 @default.
- W4311413061 hasConcept C46362747 @default.
- W4311413061 hasConcept C49040817 @default.
- W4311413061 hasConcept C62520636 @default.
- W4311413061 hasConcept C80640880 @default.
- W4311413061 hasConceptScore W4311413061C119599485 @default.
- W4311413061 hasConceptScore W4311413061C121332964 @default.
- W4311413061 hasConceptScore W4311413061C127413603 @default.
- W4311413061 hasConceptScore W4311413061C159985019 @default.
- W4311413061 hasConceptScore W4311413061C163258240 @default.
- W4311413061 hasConceptScore W4311413061C192562407 @default.
- W4311413061 hasConceptScore W4311413061C2780992000 @default.
- W4311413061 hasConceptScore W4311413061C37977207 @default.
- W4311413061 hasConceptScore W4311413061C41008148 @default.
- W4311413061 hasConceptScore W4311413061C46362747 @default.
- W4311413061 hasConceptScore W4311413061C49040817 @default.
- W4311413061 hasConceptScore W4311413061C62520636 @default.
- W4311413061 hasConceptScore W4311413061C80640880 @default.
- W4311413061 hasLocation W43114130611 @default.
- W4311413061 hasOpenAccess W4311413061 @default.
- W4311413061 hasPrimaryLocation W43114130611 @default.
- W4311413061 hasRelatedWork W1993945107 @default.
- W4311413061 hasRelatedWork W1996984702 @default.
- W4311413061 hasRelatedWork W1998831438 @default.
- W4311413061 hasRelatedWork W2033276099 @default.
- W4311413061 hasRelatedWork W2354135708 @default.
- W4311413061 hasRelatedWork W2362436259 @default.
- W4311413061 hasRelatedWork W2373640176 @default.
- W4311413061 hasRelatedWork W2587998225 @default.
- W4311413061 hasRelatedWork W2748952813 @default.
- W4311413061 hasRelatedWork W2899084033 @default.
- W4311413061 isParatext "false" @default.
- W4311413061 isRetracted "false" @default.
- W4311413061 workType "article" @default.