Matches in SemOpenAlex for { <https://semopenalex.org/work/W4311446883> ?p ?o ?g. }
- W4311446883 endingPage "015028" @default.
- W4311446883 startingPage "015028" @default.
- W4311446883 abstract "Abstract We report the growth of nano-ripple on, initially smooth Si surface due to chemically guided additional instability generation during 10 keV C + bombardment at grazing (70°) ion incidence. Also, the transformation of the ripple structure to triangular nano-pyramidal structure at higher ion fluence is investigated in details. It is shown that the chemical nature of the surface changes due to silicon carbide formation at the ion impact sites, and the surface becomes a mixture of Si and SiC. The differential sputtering of Si from pure Si and SiC, generates an additional instability which leads to trigger the ripple pattern on the surface. The variation of height amplitude, lateral correlation length and slope angles of the developed structures are investigated and explained in terms of existing continuum theory. At very high ion fluence the transformation of the structure into three dimensional triangle (pyramidal) is revealed and the mechanism is explained in the light of variation of local ion impact angle and its consequent effects." @default.
- W4311446883 created "2022-12-26" @default.
- W4311446883 creator A5021300758 @default.
- W4311446883 creator A5050821912 @default.
- W4311446883 creator A5056492562 @default.
- W4311446883 creator A5078329381 @default.
- W4311446883 date "2022-12-29" @default.
- W4311446883 modified "2023-10-18" @default.
- W4311446883 title "Carbon ion beam induced chemical modification and nano-pyramid growth on Si surface" @default.
- W4311446883 cites W1967297285 @default.
- W4311446883 cites W1969241561 @default.
- W4311446883 cites W1971042031 @default.
- W4311446883 cites W1979545045 @default.
- W4311446883 cites W1988351361 @default.
- W4311446883 cites W1991679062 @default.
- W4311446883 cites W2008197667 @default.
- W4311446883 cites W2012090246 @default.
- W4311446883 cites W2016816152 @default.
- W4311446883 cites W2020880107 @default.
- W4311446883 cites W2022572590 @default.
- W4311446883 cites W2024600501 @default.
- W4311446883 cites W2038125175 @default.
- W4311446883 cites W2047205370 @default.
- W4311446883 cites W2048984730 @default.
- W4311446883 cites W2049125015 @default.
- W4311446883 cites W2050140075 @default.
- W4311446883 cites W2065610330 @default.
- W4311446883 cites W2070747280 @default.
- W4311446883 cites W2079557591 @default.
- W4311446883 cites W2080668629 @default.
- W4311446883 cites W2087669173 @default.
- W4311446883 cites W2113417377 @default.
- W4311446883 cites W2127259452 @default.
- W4311446883 cites W2129399906 @default.
- W4311446883 cites W2144195730 @default.
- W4311446883 cites W2314902949 @default.
- W4311446883 cites W2462597833 @default.
- W4311446883 cites W2527892361 @default.
- W4311446883 cites W2756864092 @default.
- W4311446883 cites W2908401541 @default.
- W4311446883 cites W2911776008 @default.
- W4311446883 cites W2964353725 @default.
- W4311446883 cites W2995708617 @default.
- W4311446883 cites W3024897644 @default.
- W4311446883 cites W3101966000 @default.
- W4311446883 cites W3134310002 @default.
- W4311446883 cites W3215034146 @default.
- W4311446883 cites W4230053467 @default.
- W4311446883 cites W4281735208 @default.
- W4311446883 doi "https://doi.org/10.1088/1402-4896/acab93" @default.
- W4311446883 hasPublicationYear "2022" @default.
- W4311446883 type Work @default.
- W4311446883 citedByCount "0" @default.
- W4311446883 crossrefType "journal-article" @default.
- W4311446883 hasAuthorship W4311446883A5021300758 @default.
- W4311446883 hasAuthorship W4311446883A5050821912 @default.
- W4311446883 hasAuthorship W4311446883A5056492562 @default.
- W4311446883 hasAuthorship W4311446883A5078329381 @default.
- W4311446883 hasConcept C121332964 @default.
- W4311446883 hasConcept C145148216 @default.
- W4311446883 hasConcept C159467904 @default.
- W4311446883 hasConcept C159985019 @default.
- W4311446883 hasConcept C163258240 @default.
- W4311446883 hasConcept C178790620 @default.
- W4311446883 hasConcept C184779094 @default.
- W4311446883 hasConcept C185592680 @default.
- W4311446883 hasConcept C192562407 @default.
- W4311446883 hasConcept C207821765 @default.
- W4311446883 hasConcept C22078206 @default.
- W4311446883 hasConcept C2779599953 @default.
- W4311446883 hasConcept C2780722187 @default.
- W4311446883 hasConcept C41999313 @default.
- W4311446883 hasConcept C49040817 @default.
- W4311446883 hasConcept C50774322 @default.
- W4311446883 hasConcept C544956773 @default.
- W4311446883 hasConcept C57879066 @default.
- W4311446883 hasConcept C97355855 @default.
- W4311446883 hasConceptScore W4311446883C121332964 @default.
- W4311446883 hasConceptScore W4311446883C145148216 @default.
- W4311446883 hasConceptScore W4311446883C159467904 @default.
- W4311446883 hasConceptScore W4311446883C159985019 @default.
- W4311446883 hasConceptScore W4311446883C163258240 @default.
- W4311446883 hasConceptScore W4311446883C178790620 @default.
- W4311446883 hasConceptScore W4311446883C184779094 @default.
- W4311446883 hasConceptScore W4311446883C185592680 @default.
- W4311446883 hasConceptScore W4311446883C192562407 @default.
- W4311446883 hasConceptScore W4311446883C207821765 @default.
- W4311446883 hasConceptScore W4311446883C22078206 @default.
- W4311446883 hasConceptScore W4311446883C2779599953 @default.
- W4311446883 hasConceptScore W4311446883C2780722187 @default.
- W4311446883 hasConceptScore W4311446883C41999313 @default.
- W4311446883 hasConceptScore W4311446883C49040817 @default.
- W4311446883 hasConceptScore W4311446883C50774322 @default.
- W4311446883 hasConceptScore W4311446883C544956773 @default.
- W4311446883 hasConceptScore W4311446883C57879066 @default.
- W4311446883 hasConceptScore W4311446883C97355855 @default.
- W4311446883 hasFunder F4320320768 @default.
- W4311446883 hasIssue "1" @default.