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- W4311498664 abstract "Abstract Experimental study of the rates of plasma-chemical deposition of diamond-like coatings in toluene vapour in capacitive RF discharge was carried out. It is shown that in the RF power range of 100-300 W, the deposition rate is mainly affected by the toluene pressure in the vacuum chamber. The maximum deposition rate obtained was 4.15 μm/h." @default.
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- W4311498664 date "2022-12-01" @default.
- W4311498664 modified "2023-10-15" @default.
- W4311498664 title "Plasma-chemical deposition of diamond-like coatings in capacitively coupled RF plasma in toluene" @default.
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- W4311498664 doi "https://doi.org/10.1088/1742-6596/2379/1/012018" @default.
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