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- W4311685552 abstract "<p>In this study we report for the first time a method for direct patterning of silicon oxide on a silicon substrate by irradiation with a femtosecond laser of Mega Hertz pulse frequency under ambient condition. Embossed lines of silicon oxide with around 3~4 µm width and less than 100 nm height were formed by controlling the parameters such as laser pulse power and frequency rate. A Scanning Electron Microscope (SEM), an optical microscopy and a Micro-Raman and Energy Dispersive X-ray (EDX) spectroscopy were used to analyze the silicon oxide layer.</p>" @default.
- W4311685552 created "2022-12-28" @default.
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- W4311685552 date "2022-12-16" @default.
- W4311685552 modified "2023-10-16" @default.
- W4311685552 title "Direct patterning of silicon oxide on Si-substrate induced by femtosecond laser" @default.
- W4311685552 doi "https://doi.org/10.32920/21740843.v1" @default.
- W4311685552 hasPublicationYear "2022" @default.
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