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- W4311690251 abstract "<p>Ultrashort pulsed laser material processing is a new micromachining method that is gaining interest. Its capability of submicrometer machining has been proved. To obtain high speed and highly flexible beam steering, a two-axis acousto-optic deflector is employed. However, dispersion associated with acoustic-optic interaction will cause serious spatial deformation on the writing spot. The compensation for dispersion is proposed and studied. Experiments show promising results. An additional advantage of the proposed compensation method is that it can also precisely control the pulse number, and, hence improve the quality of ablation.</p>" @default.
- W4311690251 created "2022-12-28" @default.
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- W4311690251 date "2022-12-17" @default.
- W4311690251 modified "2023-09-25" @default.
- W4311690251 title "Angular dispersion compensation for acousto-optic devices used for ultrashort-pulsed laser micromachining" @default.
- W4311690251 doi "https://doi.org/10.32920/21740831.v1" @default.
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