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- W4311746934 abstract "The periodic nonlinear error (PNL) caused by the high-order optical crosstalk of the homodyne interferometer with high optical subdivisions cannot be perfectly compensated by the ellipse fitting correction algorithm. In this paper, we focus on the PNL and propose a method to suppress it. In the method, the core idea of the multiple measurement signals algorithm is to eliminate the redundant items in the signals through the linear combination of six signals with the certain phase differences. Practical schemes for signals generation are also described in detail. The method is verified by simulations and experiments. In the experiments, the method proposed suppresses PNL at the order of 100 pm/√Hz compared with direct ellipse fitting correction algorithm (at the order of 1 nm/√Hz)." @default.
- W4311746934 created "2022-12-28" @default.
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- W4311746934 date "2023-03-01" @default.
- W4311746934 modified "2023-09-27" @default.
- W4311746934 title "Method for suppressing periodic nonlinear errors caused by high-order optical crosstalk in high-subdivision homodyne interferometer" @default.
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- W4311746934 doi "https://doi.org/10.1016/j.optlaseng.2022.107387" @default.
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