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• W4311764044 abstract "Abstract In this paper, a novel optical MEMS accelerometer is proposed based on evanescent coupling between parallel silicon nanowaveguides. The coupling length between nanowaveguides changes due to the input acceleration, leading to a great change of coupling efficiency. As a result, the applied acceleration can be obtained by measuring the transmission of waveguiding light. Simulation results with optical displacement sensing sensitivity of 32.83%/ $$upmu $$ <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML> <mml:mi>μ</mml:mi> </mml:math> m within measurement range of 1.68 g is obtained. This design shows high compactness with no need of assembly, suggesting great potential in applications such as integrated photonic circuits." @default.
• W4311764044 created "2022-12-28" @default.
• W4311764044 creator A5011995432 @default.
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• W4311764044 date "2022-12-15" @default.
• W4311764044 modified "2023-10-14" @default.
• W4311764044 title "Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides" @default.
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• W4311764044 doi "https://doi.org/10.1038/s41598-022-25760-8" @default.
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