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- W4312103685 abstract "Quantitative phase microscopy (QPM) has been widely used in material metrology field, while the limited phase sensitivity and simple thickness retrieval model hinder the further applications for profiling very thin materials (e.g., two-dimensional (2D) materials). Here, we present a high sensitivity QPM method, where a common-path interferometry scheme and a high full-well-capacity camera are used, and a picometer-level optical pathlength difference sensitivity is achieved. Meanwhile, the transmission matrix model is developed to obtain accurate thickness retrieval. We validated our results by profiling monolayer MoS2 and few-layered MoSe <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf>" @default.
- W4312103685 created "2023-01-04" @default.
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- W4312103685 date "2022-11-01" @default.
- W4312103685 modified "2023-09-27" @default.
- W4312103685 title "Transmission Matrix-based Quantitative Phase Microscopy with High Sensitivity for Profiling 2D Materials" @default.
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- W4312103685 doi "https://doi.org/10.1109/tencon55691.2022.9977800" @default.
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