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- W4312133744 abstract "The modeling and simulation of a single axis MEMS capacitive accelerometer built for automotive applications, notably airbag systems, are presented in this study. In the event of a car accident involving sudden accelerations, to minimize passenger casualties, it becomes vital to assess their intensity at the earliest. A MEMS sensor can be used to activate the security systems if the acceleration reaches a particular level. In this paper, two MEMS accelerometer models of same dice area but with different structure and different orientation are discussed. The performance of the accelerometers is tabulated which is calculated analytically as well as by simulation study. It is observed that the resonant frequency of Models 1 and 2 is 2.1 kHz and 7.8 kHz, and the sensitivity is found to be 1.31 pF and 16.4 pF, respectively. The accelerometers are simulated using COMSOL Multiphysics, and Ac analysis is done in MATLAB environment." @default.
- W4312133744 created "2023-01-04" @default.
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- W4312133744 date "2022-12-13" @default.
- W4312133744 modified "2023-10-18" @default.
- W4312133744 title "Design and System Level Simulation of a MEMS Differential Capacitive Accelerometer" @default.
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- W4312133744 doi "https://doi.org/10.1007/978-981-19-5482-5_81" @default.
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