FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4312192012> ?p ?o ?g. }

• W4312192012 endingPage "045203" @default.
• W4312192012 startingPage "045203" @default.
• W4312192012 abstract "Abstract High-frequency capacitively coupled plasmas (HF-CCPs) have been widely investigated physically, electrically, optically, and numerically. Such research has focused on the sustaining mechanism and the interaction of the ion sheath with the material surface. Most of the reactive feed gas molecules produce a pair consisting of a negative ion and a neutral by the dissociative electron attachment. The low-temperature electronegative plasma with high electronegativity has an interesting and specific sustaining mechanism caused by the negative ions in HF-CCPs. One of the functions is a production of high energy electrons in front of the instantaneous anode under the presence of a static double layer with field reversal. Current understanding of electronegative plasmas has been advanced through the knowledge about the fundamental collision, transport processes, and related effects of negative ion and long-lived neutral on the plasma structure and function. We present new insights into the injection of energetic beam-like electrons to a biased wafer in a pulsed two-frequency mode in electronegative HF-CCP, based on a series of our previous works in CF 4 /Ar. Here, the criteria, consisting of plasma internal and external parameters, for the injection provide the design rule for a charging free plasma process. The magnitude of the electronegativity as a key parameter to inject negative charges is elucidated in the bulk plasma as a function of gas density times electrode distance in HF-CCP in O 2 as an example. Both sides of the electronegativity correspond to the different types of the transport and the sustainability of the bulk plasma." @default.
• W4312192012 created "2023-01-04" @default.
• W4312192012 creator A5051187319 @default.
• W4312192012 date "2022-12-22" @default.
• W4312192012 modified "2023-10-14" @default.
• W4312192012 title "Current status and new insights about the capacitively coupled electronegative plasma source: injection of energetic beam-like electrons to electrode" @default.
• W4312192012 cites W1970034181 @default.
• W4312192012 cites W1971991820 @default.
• W4312192012 cites W1972328431 @default.
• W4312192012 cites W1973886235 @default.
• W4312192012 cites W1979176623 @default.
• W4312192012 cites W1984846961 @default.
• W4312192012 cites W1985334028 @default.
• W4312192012 cites W1988848462 @default.
• W4312192012 cites W1990378679 @default.
• W4312192012 cites W1996201179 @default.
• W4312192012 cites W1997112164 @default.
• W4312192012 cites W1999599779 @default.
• W4312192012 cites W2000552583 @default.
• W4312192012 cites W2000750396 @default.
• W4312192012 cites W2001137122 @default.
• W4312192012 cites W2004179577 @default.
• W4312192012 cites W2010839848 @default.
• W4312192012 cites W2013643025 @default.
• W4312192012 cites W2021974864 @default.
• W4312192012 cites W2024879546 @default.
• W4312192012 cites W2028098179 @default.
• W4312192012 cites W2030857277 @default.
• W4312192012 cites W2031201399 @default.
• W4312192012 cites W2031688765 @default.
• W4312192012 cites W2033122585 @default.
• W4312192012 cites W2034108095 @default.
• W4312192012 cites W2038900562 @default.
• W4312192012 cites W2039948801 @default.
• W4312192012 cites W2040185906 @default.
• W4312192012 cites W2041009400 @default.
• W4312192012 cites W2042159668 @default.
• W4312192012 cites W2045452312 @default.
• W4312192012 cites W2048635495 @default.
• W4312192012 cites W2050537085 @default.
• W4312192012 cites W2050556630 @default.
• W4312192012 cites W2061139552 @default.
• W4312192012 cites W2061836063 @default.
• W4312192012 cites W2065725998 @default.
• W4312192012 cites W2066774436 @default.
• W4312192012 cites W2075494014 @default.
• W4312192012 cites W2082497137 @default.
• W4312192012 cites W2085086760 @default.
• W4312192012 cites W2086920458 @default.
• W4312192012 cites W2088894002 @default.
• W4312192012 cites W2089214316 @default.
• W4312192012 cites W2094048305 @default.
• W4312192012 cites W2098537057 @default.
• W4312192012 cites W2098997637 @default.
• W4312192012 cites W2153131814 @default.
• W4312192012 cites W2217680387 @default.
• W4312192012 cites W2428526256 @default.
• W4312192012 cites W2470621822 @default.
• W4312192012 cites W2472455114 @default.
• W4312192012 cites W2608600581 @default.
• W4312192012 cites W2756474963 @default.
• W4312192012 cites W2769922455 @default.
• W4312192012 cites W2789852911 @default.
• W4312192012 cites W2791131033 @default.
• W4312192012 cites W2800185897 @default.
• W4312192012 cites W2805549904 @default.
• W4312192012 cites W2890008539 @default.
• W4312192012 cites W2938421330 @default.
• W4312192012 cites W2965188804 @default.
• W4312192012 cites W2979372889 @default.
• W4312192012 cites W2998297001 @default.
• W4312192012 cites W2998976050 @default.
• W4312192012 cites W3047592208 @default.
• W4312192012 cites W3081267252 @default.
• W4312192012 cites W3086050233 @default.
• W4312192012 cites W3101378854 @default.
• W4312192012 cites W3101491691 @default.
• W4312192012 cites W3126645943 @default.
• W4312192012 cites W3130324636 @default.
• W4312192012 cites W3131407763 @default.
• W4312192012 cites W3134899006 @default.
• W4312192012 cites W3137518836 @default.
• W4312192012 cites W3140927964 @default.
• W4312192012 cites W3171430369 @default.
• W4312192012 cites W3179620305 @default.
• W4312192012 cites W3186591107 @default.
• W4312192012 cites W4200158117 @default.
• W4312192012 cites W4225305831 @default.
• W4312192012 cites W2044417772 @default.
• W4312192012 cites W2081853057 @default.
• W4312192012 doi "https://doi.org/10.1088/1361-6463/acaab6" @default.
• W4312192012 hasPublicationYear "2022" @default.
• W4312192012 type Work @default.
• W4312192012 citedByCount "2" @default.
• W4312192012 countsByYear W43121920122023 @default.
• W4312192012 crossrefType "journal-article" @default.
• W4312192012 hasAuthorship W4312192012A5051187319 @default.
• W4312192012 hasConcept C121332964 @default.

• next