Matches in SemOpenAlex for { <https://semopenalex.org/work/W4312687450> ?p ?o ?g. }
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with 100 items per page.
- W4312687450 endingPage "186" @default.
- W4312687450 startingPage "180" @default.
- W4312687450 abstract "The paper proposes a model-based control approach for thermal processing of silicon wafers such as rapid thermal processing. Heating of the wafer is achieved with a large number of high-power LEDs which enable targeted heating over the entire spatial domain. Taking advantage of this feature, a distributed PI controller is first designed assuming an idealized distributed input. This control signal is then approximated by the actual control that enters the system through shape functions using an optimization procedure. A formal analysis of the input-to-state stability with respect to the actuator error, extension with an anti-windup scheme and an experimental validation of the proposed approach are presented." @default.
- W4312687450 created "2023-01-05" @default.
- W4312687450 creator A5002069913 @default.
- W4312687450 creator A5025122566 @default.
- W4312687450 creator A5028199907 @default.
- W4312687450 creator A5032824476 @default.
- W4312687450 creator A5043859902 @default.
- W4312687450 creator A5068035849 @default.
- W4312687450 creator A5070393587 @default.
- W4312687450 date "2022-01-01" @default.
- W4312687450 modified "2023-09-30" @default.
- W4312687450 title "Model-Based Temperature Control in Thermal Processing of Silicon Wafers" @default.
- W4312687450 cites W1519488445 @default.
- W4312687450 cites W1968791407 @default.
- W4312687450 cites W1995559356 @default.
- W4312687450 cites W2012068875 @default.
- W4312687450 cites W2062834906 @default.
- W4312687450 cites W2081281036 @default.
- W4312687450 cites W2095117584 @default.
- W4312687450 cites W2136379208 @default.
- W4312687450 cites W2164748613 @default.
- W4312687450 cites W2892611231 @default.
- W4312687450 cites W3215982450 @default.
- W4312687450 cites W4234388437 @default.
- W4312687450 doi "https://doi.org/10.1016/j.ifacol.2022.10.397" @default.
- W4312687450 hasPublicationYear "2022" @default.
- W4312687450 type Work @default.
- W4312687450 citedByCount "0" @default.
- W4312687450 crossrefType "journal-article" @default.
- W4312687450 hasAuthorship W4312687450A5002069913 @default.
- W4312687450 hasAuthorship W4312687450A5025122566 @default.
- W4312687450 hasAuthorship W4312687450A5028199907 @default.
- W4312687450 hasAuthorship W4312687450A5032824476 @default.
- W4312687450 hasAuthorship W4312687450A5043859902 @default.
- W4312687450 hasAuthorship W4312687450A5068035849 @default.
- W4312687450 hasAuthorship W4312687450A5070393587 @default.
- W4312687450 hasBestOaLocation W43126874501 @default.
- W4312687450 hasConcept C121332964 @default.
- W4312687450 hasConcept C127413603 @default.
- W4312687450 hasConcept C133731056 @default.
- W4312687450 hasConcept C153294291 @default.
- W4312687450 hasConcept C154945302 @default.
- W4312687450 hasConcept C160671074 @default.
- W4312687450 hasConcept C172707124 @default.
- W4312687450 hasConcept C192562407 @default.
- W4312687450 hasConcept C203479927 @default.
- W4312687450 hasConcept C204530211 @default.
- W4312687450 hasConcept C24326235 @default.
- W4312687450 hasConcept C2775924081 @default.
- W4312687450 hasConcept C41008148 @default.
- W4312687450 hasConcept C47446073 @default.
- W4312687450 hasConcept C49040817 @default.
- W4312687450 hasConcept C536315585 @default.
- W4312687450 hasConcept C6557445 @default.
- W4312687450 hasConcept C72832162 @default.
- W4312687450 hasConcept C86803240 @default.
- W4312687450 hasConceptScore W4312687450C121332964 @default.
- W4312687450 hasConceptScore W4312687450C127413603 @default.
- W4312687450 hasConceptScore W4312687450C133731056 @default.
- W4312687450 hasConceptScore W4312687450C153294291 @default.
- W4312687450 hasConceptScore W4312687450C154945302 @default.
- W4312687450 hasConceptScore W4312687450C160671074 @default.
- W4312687450 hasConceptScore W4312687450C172707124 @default.
- W4312687450 hasConceptScore W4312687450C192562407 @default.
- W4312687450 hasConceptScore W4312687450C203479927 @default.
- W4312687450 hasConceptScore W4312687450C204530211 @default.
- W4312687450 hasConceptScore W4312687450C24326235 @default.
- W4312687450 hasConceptScore W4312687450C2775924081 @default.
- W4312687450 hasConceptScore W4312687450C41008148 @default.
- W4312687450 hasConceptScore W4312687450C47446073 @default.
- W4312687450 hasConceptScore W4312687450C49040817 @default.
- W4312687450 hasConceptScore W4312687450C536315585 @default.
- W4312687450 hasConceptScore W4312687450C6557445 @default.
- W4312687450 hasConceptScore W4312687450C72832162 @default.
- W4312687450 hasConceptScore W4312687450C86803240 @default.
- W4312687450 hasIssue "26" @default.
- W4312687450 hasLocation W43126874501 @default.
- W4312687450 hasOpenAccess W4312687450 @default.
- W4312687450 hasPrimaryLocation W43126874501 @default.
- W4312687450 hasRelatedWork W145316617 @default.
- W4312687450 hasRelatedWork W1496245907 @default.
- W4312687450 hasRelatedWork W2001400760 @default.
- W4312687450 hasRelatedWork W2011715521 @default.
- W4312687450 hasRelatedWork W2056707302 @default.
- W4312687450 hasRelatedWork W2063777331 @default.
- W4312687450 hasRelatedWork W2096600969 @default.
- W4312687450 hasRelatedWork W2115602968 @default.
- W4312687450 hasRelatedWork W2139553966 @default.
- W4312687450 hasRelatedWork W247509610 @default.
- W4312687450 hasVolume "55" @default.
- W4312687450 isParatext "false" @default.
- W4312687450 isRetracted "false" @default.
- W4312687450 workType "article" @default.