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W4312783503 endingPage "158" @default.
W4312783503 startingPage "153" @default.
W4312783503 abstract "We fabricated nanocrystalline Ge films using radio-frequency (RF) magnetron plasma sputtering deposition under a high Ar-gas pressure. The Ge nanograins changed from amorphous to crystalline when the distance between the Ge sputtering target and the substrate was decreased to 5 mm and the RF input power was 11.8 W/cm 2 (60 W), where the deposition rate was as high as 660 nm/min. In addition, the size of the nanocrystalline grains increased from 100 to 307 nm when the RF input power for plasma production was increased from 11.8 W/cm 2 (60 W) to 17.7 W/cm 2 (90 W). In the developed narrow-gap plasma process at sub-Torr pressures, nanocrystalline Ge films were successfully fabricated on Cu substrates at low temperatures, without the substrate being heated. However, when annealing was conducted under an N 2 atmosphere, which is the conventional method to induce solid-phase crystallization, the amorphous Ge layer on a Cu substrate changed to a Cu 3 Ge crystal layer through interdiffusion of Ge and Cu atoms at 400–500 °C." @default.
W4312783503 created "2023-01-05" @default.
W4312783503 creator A5006694297 @default.
W4312783503 creator A5023081987 @default.
W4312783503 creator A5041420540 @default.
W4312783503 creator A5084906587 @default.
W4312783503 date "2022-01-01" @default.
W4312783503 modified "2023-10-14" @default.
W4312783503 title "Low-Temperature and High-Speed Fabrication of Nanocrystalline Ge Films on Cu Substrates Using Sub-Torr-Pressure Plasma Sputtering" @default.
W4312783503 cites W1982501388 @default.
W4312783503 cites W1982843832 @default.
W4312783503 cites W2004569451 @default.
W4312783503 cites W2015292289 @default.
W4312783503 cites W2039285425 @default.
W4312783503 cites W2046245233 @default.
W4312783503 cites W2052606253 @default.
W4312783503 cites W2060820634 @default.
W4312783503 cites W2065077785 @default.
W4312783503 cites W2077940201 @default.
W4312783503 cites W2079478902 @default.
W4312783503 cites W2081518165 @default.
W4312783503 cites W2087289743 @default.
W4312783503 cites W2101351193 @default.
W4312783503 cites W2473804642 @default.
W4312783503 cites W2488828082 @default.
W4312783503 cites W2592617187 @default.
W4312783503 cites W2769439556 @default.
W4312783503 cites W3171377356 @default.
W4312783503 cites W3197538504 @default.
W4312783503 cites W3202317125 @default.
W4312783503 cites W4225931898 @default.
W4312783503 doi "https://doi.org/10.1109/ojnano.2022.3221462" @default.
W4312783503 hasPublicationYear "2022" @default.
W4312783503 type Work @default.
W4312783503 citedByCount "1" @default.
W4312783503 countsByYear W43127835032023 @default.
W4312783503 crossrefType "journal-article" @default.
W4312783503 hasAuthorship W4312783503A5006694297 @default.
W4312783503 hasAuthorship W4312783503A5023081987 @default.
W4312783503 hasAuthorship W4312783503A5041420540 @default.
W4312783503 hasAuthorship W4312783503A5084906587 @default.
W4312783503 hasBestOaLocation W43127835031 @default.
W4312783503 hasConcept C111368507 @default.
W4312783503 hasConcept C113196181 @default.
W4312783503 hasConcept C121332964 @default.
W4312783503 hasConcept C127313418 @default.
W4312783503 hasConcept C140676511 @default.
W4312783503 hasConcept C171250308 @default.
W4312783503 hasConcept C178790620 @default.
W4312783503 hasConcept C185592680 @default.
W4312783503 hasConcept C19067145 @default.
W4312783503 hasConcept C192562407 @default.
W4312783503 hasConcept C203036418 @default.
W4312783503 hasConcept C22423302 @default.
W4312783503 hasConcept C2777289219 @default.
W4312783503 hasConcept C30646810 @default.
W4312783503 hasConcept C56052488 @default.
W4312783503 hasConcept C61427134 @default.
W4312783503 hasConcept C8010536 @default.
W4312783503 hasConcept C97355855 @default.
W4312783503 hasConceptScore W4312783503C111368507 @default.
W4312783503 hasConceptScore W4312783503C113196181 @default.
W4312783503 hasConceptScore W4312783503C121332964 @default.
W4312783503 hasConceptScore W4312783503C127313418 @default.
W4312783503 hasConceptScore W4312783503C140676511 @default.
W4312783503 hasConceptScore W4312783503C171250308 @default.
W4312783503 hasConceptScore W4312783503C178790620 @default.
W4312783503 hasConceptScore W4312783503C185592680 @default.
W4312783503 hasConceptScore W4312783503C19067145 @default.
W4312783503 hasConceptScore W4312783503C192562407 @default.
W4312783503 hasConceptScore W4312783503C203036418 @default.
W4312783503 hasConceptScore W4312783503C22423302 @default.
W4312783503 hasConceptScore W4312783503C2777289219 @default.
W4312783503 hasConceptScore W4312783503C30646810 @default.
W4312783503 hasConceptScore W4312783503C56052488 @default.
W4312783503 hasConceptScore W4312783503C61427134 @default.
W4312783503 hasConceptScore W4312783503C8010536 @default.
W4312783503 hasConceptScore W4312783503C97355855 @default.
W4312783503 hasLocation W43127835031 @default.
W4312783503 hasOpenAccess W4312783503 @default.
W4312783503 hasPrimaryLocation W43127835031 @default.
W4312783503 hasRelatedWork W154104228 @default.
W4312783503 hasRelatedWork W2017025959 @default.
W4312783503 hasRelatedWork W2033004232 @default.
W4312783503 hasRelatedWork W2086744665 @default.
W4312783503 hasRelatedWork W2108805245 @default.
W4312783503 hasRelatedWork W2114374839 @default.
W4312783503 hasRelatedWork W2348363811 @default.
W4312783503 hasRelatedWork W2742959036 @default.
W4312783503 hasRelatedWork W2806062041 @default.
W4312783503 hasRelatedWork W94261504 @default.
W4312783503 hasVolume "3" @default.
W4312783503 isParatext "false" @default.
W4312783503 isRetracted "false" @default.
W4312783503 workType "article" @default.