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- W4312849063 abstract "In this paper, a nanosecond pulse laser is used to fabricate micro-channels on the Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> O <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> surface, and the effect of laser parameters (power, scanning speed, and scanning times) on micro-channel characteristics is investigated. Surface morphology, cross-section profile, and chemical composition are characterized by scanning electron microscope (SEM), confocal laser microscopy, and X-ray photoelectron spectroscopy (XPS). Results show that a series of phenomena such as melting, evaporation, flow, and resolidification occur during laser ablation, which lead to micro-channel structure and obvious heat-affected zone (HAZ) generated on the surface. Meanwhile, the laser parameters have significant effects on the micro-channel morphology by changing the surface energy accumulation. XPS results show that oxygen content increased and carbon content decreased after laser ablation, and a new aluminum-containing compound AlN was produced, which leads to the formation of partial cracks on the sample surface." @default.
- W4312849063 created "2023-01-05" @default.
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- W4312849063 date "2022-08-08" @default.
- W4312849063 modified "2023-10-18" @default.
- W4312849063 title "Experimental Study of Micro-channel in Al<sub>2</sub>O<sub>3</sub>by Nanosecond Laser Ablation" @default.
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- W4312849063 doi "https://doi.org/10.1109/3m-nano56083.2022.9941591" @default.
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