Matches in SemOpenAlex for { <https://semopenalex.org/work/W4313149346> ?p ?o ?g. }
- W4313149346 abstract "In this paper a novel fabrication technology for thermoelectric infrared sensors is presented. For the first time, the thermal insulation of the absorber structure is achieved by self-assembling multilayer thermocouples. After removal of a sacrificial oxide layer by vapor hydrogen fluoride (vHF) etching, the thermocouples lift off due to residual stress gradients. This provides the necessary distance between the absorber and the substrate. Compared to state-of-the-art sensors, this implementation does not require extensive bulk processing such as grinding and cavity etching to achieve a thermally isolated absorber structure. The deflection of the realized structures has shown high agreement with an analytical model which is also presented in this paper." @default.
- W4313149346 created "2023-01-06" @default.
- W4313149346 creator A5020221537 @default.
- W4313149346 creator A5021941481 @default.
- W4313149346 creator A5049852112 @default.
- W4313149346 creator A5053858781 @default.
- W4313149346 creator A5058126589 @default.
- W4313149346 creator A5065563882 @default.
- W4313149346 creator A5079205018 @default.
- W4313149346 date "2022-04-27" @default.
- W4313149346 modified "2023-09-27" @default.
- W4313149346 title "Novel Fabrication Technology for Thermoelectric Infrared Sensors Using Surface Micromachining" @default.
- W4313149346 cites W1972044777 @default.
- W4313149346 cites W1979079174 @default.
- W4313149346 cites W2000412369 @default.
- W4313149346 cites W2009045641 @default.
- W4313149346 cites W2011282992 @default.
- W4313149346 cites W2012084735 @default.
- W4313149346 cites W2012241126 @default.
- W4313149346 cites W2026711498 @default.
- W4313149346 cites W2030341786 @default.
- W4313149346 cites W2054224379 @default.
- W4313149346 cites W2056048665 @default.
- W4313149346 cites W2056090196 @default.
- W4313149346 cites W2056473999 @default.
- W4313149346 cites W2072051682 @default.
- W4313149346 cites W2078390316 @default.
- W4313149346 cites W2085163722 @default.
- W4313149346 cites W2088357735 @default.
- W4313149346 cites W2092346700 @default.
- W4313149346 cites W2094692059 @default.
- W4313149346 cites W2097831605 @default.
- W4313149346 cites W2110070104 @default.
- W4313149346 cites W2118176630 @default.
- W4313149346 cites W2147142329 @default.
- W4313149346 cites W2150352833 @default.
- W4313149346 cites W2166121654 @default.
- W4313149346 cites W2169258629 @default.
- W4313149346 cites W2175868557 @default.
- W4313149346 cites W2913607684 @default.
- W4313149346 cites W4255809682 @default.
- W4313149346 doi "https://doi.org/10.1109/ssi56489.2022.9901417" @default.
- W4313149346 hasPublicationYear "2022" @default.
- W4313149346 type Work @default.
- W4313149346 citedByCount "0" @default.
- W4313149346 crossrefType "proceedings-article" @default.
- W4313149346 hasAuthorship W4313149346A5020221537 @default.
- W4313149346 hasAuthorship W4313149346A5021941481 @default.
- W4313149346 hasAuthorship W4313149346A5049852112 @default.
- W4313149346 hasAuthorship W4313149346A5053858781 @default.
- W4313149346 hasAuthorship W4313149346A5058126589 @default.
- W4313149346 hasAuthorship W4313149346A5065563882 @default.
- W4313149346 hasAuthorship W4313149346A5079205018 @default.
- W4313149346 hasConcept C100460472 @default.
- W4313149346 hasConcept C120665830 @default.
- W4313149346 hasConcept C121332964 @default.
- W4313149346 hasConcept C136525101 @default.
- W4313149346 hasConcept C142724271 @default.
- W4313149346 hasConcept C145667562 @default.
- W4313149346 hasConcept C158355884 @default.
- W4313149346 hasConcept C159985019 @default.
- W4313149346 hasConcept C168068576 @default.
- W4313149346 hasConcept C192562407 @default.
- W4313149346 hasConcept C204787440 @default.
- W4313149346 hasConcept C2777571299 @default.
- W4313149346 hasConcept C2779227376 @default.
- W4313149346 hasConcept C37292000 @default.
- W4313149346 hasConcept C47279676 @default.
- W4313149346 hasConcept C49040817 @default.
- W4313149346 hasConcept C63024428 @default.
- W4313149346 hasConcept C71924100 @default.
- W4313149346 hasConcept C97355855 @default.
- W4313149346 hasConceptScore W4313149346C100460472 @default.
- W4313149346 hasConceptScore W4313149346C120665830 @default.
- W4313149346 hasConceptScore W4313149346C121332964 @default.
- W4313149346 hasConceptScore W4313149346C136525101 @default.
- W4313149346 hasConceptScore W4313149346C142724271 @default.
- W4313149346 hasConceptScore W4313149346C145667562 @default.
- W4313149346 hasConceptScore W4313149346C158355884 @default.
- W4313149346 hasConceptScore W4313149346C159985019 @default.
- W4313149346 hasConceptScore W4313149346C168068576 @default.
- W4313149346 hasConceptScore W4313149346C192562407 @default.
- W4313149346 hasConceptScore W4313149346C204787440 @default.
- W4313149346 hasConceptScore W4313149346C2777571299 @default.
- W4313149346 hasConceptScore W4313149346C2779227376 @default.
- W4313149346 hasConceptScore W4313149346C37292000 @default.
- W4313149346 hasConceptScore W4313149346C47279676 @default.
- W4313149346 hasConceptScore W4313149346C49040817 @default.
- W4313149346 hasConceptScore W4313149346C63024428 @default.
- W4313149346 hasConceptScore W4313149346C71924100 @default.
- W4313149346 hasConceptScore W4313149346C97355855 @default.
- W4313149346 hasFunder F4320321408 @default.
- W4313149346 hasLocation W43131493461 @default.
- W4313149346 hasOpenAccess W4313149346 @default.
- W4313149346 hasPrimaryLocation W43131493461 @default.
- W4313149346 hasRelatedWork W1545024147 @default.
- W4313149346 hasRelatedWork W1557603030 @default.
- W4313149346 hasRelatedWork W2003623875 @default.
- W4313149346 hasRelatedWork W2010312440 @default.
- W4313149346 hasRelatedWork W2061214168 @default.