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- W4313164939 endingPage "K06" @default.
- W4313164939 startingPage "2P2" @default.
- W4313164939 abstract "This paper presents a design of Si strain sensor to integrate of soft bending microactuator. Bending motion can be detected by integrating a strain sensor into the soft bending microactuator. We focused on Si strain sensor that uses semiconductors with high sensitivity to detect minute movement. However, the allowable strain of Si is small, and the bending motion of the soft actuator may cause Si to break. Therefore, in this study, we proposed a structure in which only the sensing part of the Si strain sensor is made of a thin. In addition, the evaluation results of failure strain showed that flexibility is added by thinning. The result will contribute to the detection of minute forces on delicate objects by soft actuators." @default.
- W4313164939 created "2023-01-06" @default.
- W4313164939 creator A5038524732 @default.
- W4313164939 creator A5060202594 @default.
- W4313164939 creator A5083344950 @default.
- W4313164939 date "2022-01-01" @default.
- W4313164939 modified "2023-09-23" @default.
- W4313164939 title "Si strain sensor for integration of soft bending microactuator" @default.
- W4313164939 doi "https://doi.org/10.1299/jsmermd.2022.2p2-k06" @default.
- W4313164939 hasPublicationYear "2022" @default.
- W4313164939 type Work @default.
- W4313164939 citedByCount "0" @default.
- W4313164939 crossrefType "journal-article" @default.
- W4313164939 hasAuthorship W4313164939A5038524732 @default.
- W4313164939 hasAuthorship W4313164939A5060202594 @default.
- W4313164939 hasAuthorship W4313164939A5083344950 @default.
- W4313164939 hasConcept C105795698 @default.
- W4313164939 hasConcept C119599485 @default.
- W4313164939 hasConcept C121332964 @default.
- W4313164939 hasConcept C126322002 @default.
- W4313164939 hasConcept C127413603 @default.
- W4313164939 hasConcept C159985019 @default.
- W4313164939 hasConcept C172707124 @default.
- W4313164939 hasConcept C192562407 @default.
- W4313164939 hasConcept C21200559 @default.
- W4313164939 hasConcept C24326235 @default.
- W4313164939 hasConcept C24890656 @default.
- W4313164939 hasConcept C2778022156 @default.
- W4313164939 hasConcept C2780598303 @default.
- W4313164939 hasConcept C33923547 @default.
- W4313164939 hasConcept C58373989 @default.
- W4313164939 hasConcept C66938386 @default.
- W4313164939 hasConcept C71924100 @default.
- W4313164939 hasConcept C87210426 @default.
- W4313164939 hasConceptScore W4313164939C105795698 @default.
- W4313164939 hasConceptScore W4313164939C119599485 @default.
- W4313164939 hasConceptScore W4313164939C121332964 @default.
- W4313164939 hasConceptScore W4313164939C126322002 @default.
- W4313164939 hasConceptScore W4313164939C127413603 @default.
- W4313164939 hasConceptScore W4313164939C159985019 @default.
- W4313164939 hasConceptScore W4313164939C172707124 @default.
- W4313164939 hasConceptScore W4313164939C192562407 @default.
- W4313164939 hasConceptScore W4313164939C21200559 @default.
- W4313164939 hasConceptScore W4313164939C24326235 @default.
- W4313164939 hasConceptScore W4313164939C24890656 @default.
- W4313164939 hasConceptScore W4313164939C2778022156 @default.
- W4313164939 hasConceptScore W4313164939C2780598303 @default.
- W4313164939 hasConceptScore W4313164939C33923547 @default.
- W4313164939 hasConceptScore W4313164939C58373989 @default.
- W4313164939 hasConceptScore W4313164939C66938386 @default.
- W4313164939 hasConceptScore W4313164939C71924100 @default.
- W4313164939 hasConceptScore W4313164939C87210426 @default.
- W4313164939 hasIssue "0" @default.
- W4313164939 hasLocation W43131649391 @default.
- W4313164939 hasOpenAccess W4313164939 @default.
- W4313164939 hasPrimaryLocation W43131649391 @default.
- W4313164939 hasRelatedWork W2064690514 @default.
- W4313164939 hasRelatedWork W2137307547 @default.
- W4313164939 hasRelatedWork W2167807497 @default.
- W4313164939 hasRelatedWork W2342878234 @default.
- W4313164939 hasRelatedWork W2380293314 @default.
- W4313164939 hasRelatedWork W2593200884 @default.
- W4313164939 hasRelatedWork W2759525393 @default.
- W4313164939 hasRelatedWork W3003859802 @default.
- W4313164939 hasRelatedWork W3082440218 @default.
- W4313164939 hasRelatedWork W4242958398 @default.
- W4313164939 hasVolume "2022" @default.
- W4313164939 isParatext "false" @default.
- W4313164939 isRetracted "false" @default.
- W4313164939 workType "article" @default.