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- W4313219610 abstract "In 10nm and below technology node, the device changes smaller and introduced some new process changes, some advance TEM methods are used in the 10nm and below device process monitor or research tools during the process developing. We did some advance TEM research on Fin and metal gate, and some examples are given in this paper. It is clearly show the importance of advance TEM method play essential role in process monitor and process developing." @default.
- W4313219610 created "2023-01-06" @default.
- W4313219610 creator A5019178258 @default.
- W4313219610 creator A5026218314 @default.
- W4313219610 creator A5027614486 @default.
- W4313219610 creator A5037691180 @default.
- W4313219610 creator A5039306579 @default.
- W4313219610 date "2022-12-29" @default.
- W4313219610 modified "2023-09-27" @default.
- W4313219610 title "Advance TEM application in 10 nm and below technology node chips" @default.
- W4313219610 cites W2022963854 @default.
- W4313219610 cites W2030615461 @default.
- W4313219610 cites W2040974883 @default.
- W4313219610 cites W2055973445 @default.
- W4313219610 cites W2079999336 @default.
- W4313219610 cites W2124045482 @default.
- W4313219610 cites W2149786255 @default.
- W4313219610 cites W2155105910 @default.
- W4313219610 cites W4225307030 @default.
- W4313219610 cites W4240508920 @default.
- W4313219610 cites W4254708062 @default.
- W4313219610 doi "https://doi.org/10.1117/12.2663136" @default.
- W4313219610 hasPublicationYear "2022" @default.
- W4313219610 type Work @default.
- W4313219610 citedByCount "0" @default.
- W4313219610 crossrefType "proceedings-article" @default.
- W4313219610 hasAuthorship W4313219610A5019178258 @default.
- W4313219610 hasAuthorship W4313219610A5026218314 @default.
- W4313219610 hasAuthorship W4313219610A5027614486 @default.
- W4313219610 hasAuthorship W4313219610A5037691180 @default.
- W4313219610 hasAuthorship W4313219610A5039306579 @default.
- W4313219610 hasBestOaLocation W43132196101 @default.
- W4313219610 hasConcept C111919701 @default.
- W4313219610 hasConcept C127413603 @default.
- W4313219610 hasConcept C149635348 @default.
- W4313219610 hasConcept C192562407 @default.
- W4313219610 hasConcept C41008148 @default.
- W4313219610 hasConcept C49040817 @default.
- W4313219610 hasConcept C62611344 @default.
- W4313219610 hasConcept C66938386 @default.
- W4313219610 hasConcept C98045186 @default.
- W4313219610 hasConceptScore W4313219610C111919701 @default.
- W4313219610 hasConceptScore W4313219610C127413603 @default.
- W4313219610 hasConceptScore W4313219610C149635348 @default.
- W4313219610 hasConceptScore W4313219610C192562407 @default.
- W4313219610 hasConceptScore W4313219610C41008148 @default.
- W4313219610 hasConceptScore W4313219610C49040817 @default.
- W4313219610 hasConceptScore W4313219610C62611344 @default.
- W4313219610 hasConceptScore W4313219610C66938386 @default.
- W4313219610 hasConceptScore W4313219610C98045186 @default.
- W4313219610 hasLocation W43132196101 @default.
- W4313219610 hasOpenAccess W4313219610 @default.
- W4313219610 hasPrimaryLocation W43132196101 @default.
- W4313219610 hasRelatedWork W2058676402 @default.
- W4313219610 hasRelatedWork W2068185143 @default.
- W4313219610 hasRelatedWork W2329285141 @default.
- W4313219610 hasRelatedWork W2383650581 @default.
- W4313219610 hasRelatedWork W2405379563 @default.
- W4313219610 hasRelatedWork W2899084033 @default.
- W4313219610 hasRelatedWork W2902546961 @default.
- W4313219610 hasRelatedWork W3013959128 @default.
- W4313219610 hasRelatedWork W4313653414 @default.
- W4313219610 hasRelatedWork W2012842278 @default.
- W4313219610 isParatext "false" @default.
- W4313219610 isRetracted "false" @default.
- W4313219610 workType "article" @default.