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- W4313253269 endingPage "127064" @default.
- W4313253269 startingPage "127064" @default.
- W4313253269 abstract "The noncontact crucible (NOC) method has a large and deep low-temperature region in Si melt to grow a uniform large Si single ingot. The theoretical simulation pointed out that the lowest vacancy or interstitial Si atom area appears in the region with the smaller ratio between temperature gradients at melt surface and growing interface. The growth condition to obtain this region is suitable for the NOC method. The quality of a NOC ingot was first evaluated by determining the distribution of bulk micro defect (BMD), bulk stacking fault (BSF), oxidation induced stacking fault (OISF) and crystal originated particle (COP) in the cross section of the dislocation-free ingot. A ring-OISF or BSF can be clearly observed on the cross section cut from the middle and tail parts of the ingot. BMD can be observed inside and outside the ring-OISF. By estimated comparison to the none-doping case, CV (=CI) at cross point clearly has a trend to increase for the high B-doing case (5 × 1019 cm−3), where CV and CI are concentration of vacancy and interstitial Si atom, respectively. Nevertheless, in comparison with the distribution of COP in Cz and NOC ingots, COP cannot be detected inside the ring-OISF in the NOC wafer under the same etching process as many COP can be observed in the Cz wafer. This may be a unique feature for NOC growth." @default.
- W4313253269 created "2023-01-06" @default.
- W4313253269 creator A5054506362 @default.
- W4313253269 creator A5054953532 @default.
- W4313253269 creator A5060905555 @default.
- W4313253269 creator A5087275586 @default.
- W4313253269 date "2023-03-01" @default.
- W4313253269 modified "2023-10-17" @default.
- W4313253269 title "Two-dimensional BMD, BSF, ring-OISF and COP distributions in a dislocation-free ingot grown by the NOC method" @default.
- W4313253269 cites W1975617097 @default.
- W4313253269 cites W1987472044 @default.
- W4313253269 cites W2020106264 @default.
- W4313253269 cites W2035295543 @default.
- W4313253269 cites W2035974690 @default.
- W4313253269 cites W2053872893 @default.
- W4313253269 cites W2065713900 @default.
- W4313253269 cites W2080157262 @default.
- W4313253269 cites W2082767611 @default.
- W4313253269 cites W2087555866 @default.
- W4313253269 cites W2332768659 @default.
- W4313253269 cites W2522750361 @default.
- W4313253269 cites W2533668117 @default.
- W4313253269 cites W2885806774 @default.
- W4313253269 cites W2962704291 @default.
- W4313253269 cites W3042463110 @default.
- W4313253269 cites W4281477100 @default.
- W4313253269 doi "https://doi.org/10.1016/j.jcrysgro.2022.127064" @default.
- W4313253269 hasPublicationYear "2023" @default.
- W4313253269 type Work @default.
- W4313253269 citedByCount "0" @default.
- W4313253269 crossrefType "journal-article" @default.
- W4313253269 hasAuthorship W4313253269A5054506362 @default.
- W4313253269 hasAuthorship W4313253269A5054953532 @default.
- W4313253269 hasAuthorship W4313253269A5060905555 @default.
- W4313253269 hasAuthorship W4313253269A5087275586 @default.
- W4313253269 hasConcept C114221277 @default.
- W4313253269 hasConcept C159122135 @default.
- W4313253269 hasConcept C159985019 @default.
- W4313253269 hasConcept C160671074 @default.
- W4313253269 hasConcept C171250308 @default.
- W4313253269 hasConcept C178790620 @default.
- W4313253269 hasConcept C185592680 @default.
- W4313253269 hasConcept C192562407 @default.
- W4313253269 hasConcept C2778536302 @default.
- W4313253269 hasConcept C2778547858 @default.
- W4313253269 hasConcept C2780026712 @default.
- W4313253269 hasConcept C2780378348 @default.
- W4313253269 hasConcept C8010536 @default.
- W4313253269 hasConceptScore W4313253269C114221277 @default.
- W4313253269 hasConceptScore W4313253269C159122135 @default.
- W4313253269 hasConceptScore W4313253269C159985019 @default.
- W4313253269 hasConceptScore W4313253269C160671074 @default.
- W4313253269 hasConceptScore W4313253269C171250308 @default.
- W4313253269 hasConceptScore W4313253269C178790620 @default.
- W4313253269 hasConceptScore W4313253269C185592680 @default.
- W4313253269 hasConceptScore W4313253269C192562407 @default.
- W4313253269 hasConceptScore W4313253269C2778536302 @default.
- W4313253269 hasConceptScore W4313253269C2778547858 @default.
- W4313253269 hasConceptScore W4313253269C2780026712 @default.
- W4313253269 hasConceptScore W4313253269C2780378348 @default.
- W4313253269 hasConceptScore W4313253269C8010536 @default.
- W4313253269 hasLocation W43132532691 @default.
- W4313253269 hasOpenAccess W4313253269 @default.
- W4313253269 hasPrimaryLocation W43132532691 @default.
- W4313253269 hasRelatedWork W1977811652 @default.
- W4313253269 hasRelatedWork W2002367220 @default.
- W4313253269 hasRelatedWork W2040246326 @default.
- W4313253269 hasRelatedWork W2050294879 @default.
- W4313253269 hasRelatedWork W2053380511 @default.
- W4313253269 hasRelatedWork W2224944106 @default.
- W4313253269 hasRelatedWork W272019517 @default.
- W4313253269 hasRelatedWork W3106386475 @default.
- W4313253269 hasRelatedWork W4246914135 @default.
- W4313253269 hasRelatedWork W2013133684 @default.
- W4313253269 hasVolume "605" @default.
- W4313253269 isParatext "false" @default.
- W4313253269 isRetracted "false" @default.
- W4313253269 workType "article" @default.