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• W4313259647 endingPage "39" @default.
• W4313259647 startingPage "39" @default.
• W4313259647 abstract "In this paper, we demonstrate a novel photonic integrated accelerometer based on the optical mode localization sensing mechanism, which is designed on an SOI wafer with a device layer thickness of 220 nm. High sensitivity and large measurement range can be achieved by integrating coupled ring resonators with a suspended directional coupler on a proof mass. With the help of FEA simulation and numerical analysis, the proposed optical mode-localized sensor presents a sensitivity of 10/g (modal power ratio/acceleration) and an inertial displacement of from −8 to 10 microns corresponding to a range from −23.5 to 29.4 g. The free spectral range is 4.05 nm around 1.55 microns. The acceleration resolution limited by thermomechanical noise is 4.874 μg. The comprehensive performance of this design is competitive with existing MEMS mode localized accelerometers. It demonstrates the potential of the optical mode-localized inertial sensors as candidates for state-of-the-art sensors in the future." @default.
• W4313259647 created "2023-01-06" @default.
• W4313259647 creator A5029427112 @default.
• W4313259647 creator A5048348322 @default.
• W4313259647 creator A5087096719 @default.
• W4313259647 date "2022-12-23" @default.
• W4313259647 modified "2023-09-30" @default.
• W4313259647 title "Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer" @default.
• W4313259647 cites W2001707964 @default.
• W4313259647 cites W2047816391 @default.
• W4313259647 cites W2048712334 @default.
• W4313259647 cites W2084772656 @default.
• W4313259647 cites W2091338416 @default.
• W4313259647 cites W2095941374 @default.
• W4313259647 cites W2119159136 @default.
• W4313259647 cites W2144050360 @default.
• W4313259647 cites W2319570990 @default.
• W4313259647 cites W2478441865 @default.
• W4313259647 cites W2481905262 @default.
• W4313259647 cites W2782795753 @default.
• W4313259647 cites W2791858066 @default.
• W4313259647 cites W2798663608 @default.
• W4313259647 cites W2906889225 @default.
• W4313259647 cites W2968114874 @default.
• W4313259647 cites W2997719126 @default.
• W4313259647 cites W3015534879 @default.
• W4313259647 cites W3043823352 @default.
• W4313259647 cites W3081998296 @default.
• W4313259647 cites W3142511774 @default.
• W4313259647 cites W3195877134 @default.
• W4313259647 cites W3208513863 @default.
• W4313259647 cites W4214483997 @default.
• W4313259647 doi "https://doi.org/10.3390/mi14010039" @default.
• W4313259647 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/36677100" @default.
• W4313259647 hasPublicationYear "2022" @default.
• W4313259647 type Work @default.
• W4313259647 citedByCount "0" @default.
• W4313259647 crossrefType "journal-article" @default.
• W4313259647 hasAuthorship W4313259647A5029427112 @default.
• W4313259647 hasAuthorship W4313259647A5048348322 @default.
• W4313259647 hasAuthorship W4313259647A5087096719 @default.
• W4313259647 hasBestOaLocation W43132596471 @default.
• W4313259647 hasConcept C107551265 @default.
• W4313259647 hasConcept C115961682 @default.
• W4313259647 hasConcept C117896860 @default.
• W4313259647 hasConcept C120665830 @default.
• W4313259647 hasConcept C121332964 @default.
• W4313259647 hasConcept C127413603 @default.
• W4313259647 hasConcept C154945302 @default.
• W4313259647 hasConcept C15744967 @default.
• W4313259647 hasConcept C192562407 @default.
• W4313259647 hasConcept C21200559 @default.
• W4313259647 hasConcept C24326235 @default.
• W4313259647 hasConcept C24890656 @default.
• W4313259647 hasConcept C2776015930 @default.
• W4313259647 hasConcept C2780330379 @default.
• W4313259647 hasConcept C37977207 @default.
• W4313259647 hasConcept C41008148 @default.
• W4313259647 hasConcept C49040817 @default.
• W4313259647 hasConcept C53143962 @default.
• W4313259647 hasConcept C542102704 @default.
• W4313259647 hasConcept C544956773 @default.
• W4313259647 hasConcept C62520636 @default.
• W4313259647 hasConcept C74650414 @default.
• W4313259647 hasConcept C89805583 @default.
• W4313259647 hasConcept C97126364 @default.
• W4313259647 hasConcept C99498987 @default.
• W4313259647 hasConceptScore W4313259647C107551265 @default.
• W4313259647 hasConceptScore W4313259647C115961682 @default.
• W4313259647 hasConceptScore W4313259647C117896860 @default.
• W4313259647 hasConceptScore W4313259647C120665830 @default.
• W4313259647 hasConceptScore W4313259647C121332964 @default.
• W4313259647 hasConceptScore W4313259647C127413603 @default.
• W4313259647 hasConceptScore W4313259647C154945302 @default.
• W4313259647 hasConceptScore W4313259647C15744967 @default.
• W4313259647 hasConceptScore W4313259647C192562407 @default.
• W4313259647 hasConceptScore W4313259647C21200559 @default.
• W4313259647 hasConceptScore W4313259647C24326235 @default.
• W4313259647 hasConceptScore W4313259647C24890656 @default.
• W4313259647 hasConceptScore W4313259647C2776015930 @default.
• W4313259647 hasConceptScore W4313259647C2780330379 @default.
• W4313259647 hasConceptScore W4313259647C37977207 @default.
• W4313259647 hasConceptScore W4313259647C41008148 @default.
• W4313259647 hasConceptScore W4313259647C49040817 @default.
• W4313259647 hasConceptScore W4313259647C53143962 @default.
• W4313259647 hasConceptScore W4313259647C542102704 @default.
• W4313259647 hasConceptScore W4313259647C544956773 @default.
• W4313259647 hasConceptScore W4313259647C62520636 @default.
• W4313259647 hasConceptScore W4313259647C74650414 @default.
• W4313259647 hasConceptScore W4313259647C89805583 @default.
• W4313259647 hasConceptScore W4313259647C97126364 @default.
• W4313259647 hasConceptScore W4313259647C99498987 @default.
• W4313259647 hasIssue "1" @default.
• W4313259647 hasLocation W43132596471 @default.
• W4313259647 hasLocation W43132596472 @default.
• W4313259647 hasLocation W43132596473 @default.
• W4313259647 hasOpenAccess W4313259647 @default.
• W4313259647 hasPrimaryLocation W43132596471 @default.

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