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• W4313260040 endingPage "43" @default.
• W4313260040 startingPage "43" @default.
• W4313260040 abstract "The past few decades have witnessed the ultra-fast development of wireless telecommunication systems, such as mobile communication, global positioning, and data transmission systems. In these applications, radio frequency (RF) acoustic devices, such as bulk acoustic waves (BAW) and surface acoustic waves (SAW) devices, play an important role. As the integration technology of BAW and SAW devices is becoming more mature day by day, their application in the physical and biochemical sensing and actuating fields has also gradually expanded. This has led to a profusion of associated literature, and this article particularly aims to help young professionals and students obtain a comprehensive overview of such acoustic technologies. In this perspective, we report and discuss the key basic principles of SAW and BAW devices and their typical geometries and electrical characterization methodology. Regarding BAW devices, we give particular attention to film bulk acoustic resonators (FBARs), due to their advantages in terms of high frequency operation and integrability. Examples illustrating their application as RF filters, physical sensors and actuators, and biochemical sensors are presented. We then discuss recent promising studies that pave the way for the exploitation of these elastic wave devices for new applications that fit into current challenges, especially in quantum acoustics (single-electron probe/control and coherent coupling between magnons and phonons) or in other fields." @default.
• W4313260040 created "2023-01-06" @default.
• W4313260040 creator A5054850831 @default.
• W4313260040 creator A5058878190 @default.
• W4313260040 creator A5070057307 @default.
• W4313260040 date "2022-12-24" @default.
• W4313260040 modified "2023-09-30" @default.
• W4313260040 title "Trends and Applications of Surface and Bulk Acoustic Wave Devices: A Review" @default.
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