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- W4313367874 endingPage "104537" @default.
- W4313367874 startingPage "104537" @default.
- W4313367874 abstract "The fast growing of infrared imaging system for non-contact thermography, night surveillance and night driving assistance demands highly integrated optical lenses with miniaturization feature for performance improvement. Herein, we fabricated refractive type of microlens arrays (MLAs) with high numerical aperture (NA) and high integration on commercial chalcogenide glass (As2Se3) by combining photoresist thermal reflow and soft mold imprinting process. PDMS-type concave MLAs (PDMS-MLAs) soft mold is prepared by transfer printing process on photoresist (PR) MLAs fabricated by standard UV exposure and thermal reflow. The microlens on PDMS-MLAs could be further transferred to the surface of As2Se3 glass through the hot imprinting technique, forming chalcogenide glass-based MLAs (ChG-MLAs). Morphology detection reveals that microlens in the MLAs has an average aperture and sag height of approximately 13.4 and 1.7 μm. Moreover, the optical performance investigation demonstrated that the ChG-MLAs with 700 × 700 array size (10.5 × 10.5 mm) showed good structure uniformity and focusing capability, and through the FDTD simulation, it further evidenced that focal lengths of 6.3–8.1 µm with high numerical aperture of 0.64–0.73 (wavelength range: 3–5 μm) was achieved." @default.
- W4313367874 created "2023-01-06" @default.
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- W4313367874 date "2023-03-01" @default.
- W4313367874 modified "2023-10-18" @default.
- W4313367874 title "Rapid fabrication of highly integrated and high numerical aperture chalcogenide glass microlens arrays" @default.
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- W4313367874 doi "https://doi.org/10.1016/j.infrared.2022.104537" @default.
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